US-Turkey Cooperative Research: Processing for Sub-Micron Imaging in Supercritical CO2: An Integrated Approach to the Deposition and Development of Photoresists
美国-土耳其合作研究:超临界二氧化碳中的亚微米成像处理:光刻胶沉积和显影的综合方法
基本信息
- 批准号:0138283
- 负责人:
- 金额:$ 2.27万
- 依托单位:
- 依托单位国家:美国
- 项目类别:Standard Grant
- 财政年份:2002
- 资助国家:美国
- 起止时间:2002-02-15 至 2005-01-31
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
0138283 DeSimoneDescription: This project supports a cooperative research between Dr. Joseph DeSimone, Department of Chemistry, University of North Carolina (UNC) at Chapel Hill, North Carolina and Dr. Yusuf Menceloglu, Department of Engineering and Natural Sciences, Sabanci University (SU), Istanbul, Turkey. They plan to research means to improve the manufacturing of semiconductor devices. A bottleneck in advancing semiconductor devices to sub-micron features is the development of novel resist materials that show nearly unprecedented sensitivity at the desired exposures and undergo a fundamental shift away from the phenolic resins that have been used as the basis for virtually all optical resist development, while improving the environmental conditions associated with the process. The PI and his colleagues will synthesize an array of fluorinated polymers that will enable photoresist fabrication using a supercritical CO2 process. The two groups plan to develop new photoresists for 157 nm lithography. The new resists will be transparent, and will be soluble at liquid and/or supercritical CO2. Their properties will be evaluated by theoretical calculations, and then their synthesis will be conducted at SU laboratories. The research may lead to significant change in future microelectronic processes and could have a major impact on rendering photoresist production an environmentally friendly process.Scope: The two groups at UNC and SU have complementary capabilities and technical resources. A combination of activities will be used to facilitate communication between the two groups over the proposed three-year collaboration including one-month per year visits to SU laboratories, electronic mail, and teleconferencing. The two groups have collaborated in the past to develop eight US patents on heterogeneous polymerizations in CO2 and to produce several publications in important journals on polymerizations and on characterizations of polymer materials. A graduate student at UNC will participate in the project providing him with an international experience. Funding is provided by the Office of International Science and Engineering and the Division of Chemical and Transport Systems.
0138283 DeSimone描述:本项目支持北卡罗来纳州查佩尔山北卡罗来纳州(北卡罗来纳州)化学系Joseph DeSimone博士和土耳其伊斯坦布尔萨班奇大学(SU)工程和自然科学系Yusuf Menceloglu博士之间的合作研究。 他们计划研究改进半导体器件制造的方法。 将半导体器件推进到亚微米特征的瓶颈是新型抗蚀剂材料的开发,该新型抗蚀剂材料在期望的曝光下显示出几乎前所未有的灵敏度,并且经历了从酚醛树脂的根本转变,该酚醛树脂已经被用作几乎所有光学抗蚀剂开发的基础,同时改善了与该过程相关的环境条件。PI和他的同事们将合成一系列氟化聚合物,这些聚合物将使用超临界CO2工艺制造光刻胶。 这两个小组计划开发用于157 nm光刻的新光刻胶。 新的抗蚀剂将是透明的,并且将在液体和/或超临界CO2下可溶。 它们的性质将通过理论计算进行评估,然后在SU实验室进行合成。这项研究可能会导致未来微电子工艺的重大变化,并可能对光刻胶生产产生重大影响,使其成为一种环境友好的工艺。范围:两个小组在北京大学和SU有互补的能力和技术资源。 在拟议的三年合作期间,将结合各种活动来促进两个小组之间的沟通,包括每年一个月对SU实验室的访问、电子邮件和电话会议。这两个小组过去合作开发了八项关于二氧化碳中多相聚合的美国专利,并在重要期刊上发表了几篇关于聚合和聚合物材料表征的论文。 一名研究生将参加该项目,为他提供国际经验。 资金由国际科学和工程办公室以及化学和运输系统司提供。
项目成果
期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
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Joseph DeSimone其他文献
Recapitulation of the fetal pattern of expression of the Iγ- and Vγ-globin genes in cultured baboon CD34<sup>+</sup> bone marrow cells
- DOI:
10.1016/j.bcmd.2006.10.075 - 发表时间:
2007-03-01 - 期刊:
- 影响因子:
- 作者:
Donald Lavelle;Kestis Vaitkus;Joseph DeSimone - 通讯作者:
Joseph DeSimone
5-Azacytidine Increases γ-Globin Synthesis and Reduces the Proportion of Dense Cells in Patients With Sickle Cell Anemia
- DOI:
10.1182/blood.v62.2.370.370 - 发表时间:
1983-08-01 - 期刊:
- 影响因子:
- 作者:
Timothy J. Ley;Joseph DeSimone;Constance Tom Noguchi;Patricia H. Turner;Alan N. Schechter;Paul Heller;Arthur W. Nienhuis - 通讯作者:
Arthur W. Nienhuis
The pattern of covalent histone modifications throughout the β-globin gene locus in fetal liver and adult bone marrow erythroblasts pre- and post-decitabine
- DOI:
10.1016/j.bcmd.2006.10.076 - 发表时间:
2007-03-01 - 期刊:
- 影响因子:
- 作者:
Donald Lavelle;Janet Chin;Kestis Vaitkus;Mahipal Singh;Maria Hankewych;Joseph DeSimone - 通讯作者:
Joseph DeSimone
SEVERE PULMONARY HYPERTENSION IS AN INDEPENDENT PREDICTOR OF IN-HOSPITAL MORTALITY AND ACUTE KIDNEY INJURY AFTER AORTIC VALVE REPLACEMENT FOR SEVERE AORTIC STENOSIS
- DOI:
10.1016/s0735-1097(12)60895-x - 发表时间:
2012-03-27 - 期刊:
- 影响因子:
- 作者:
David Zlotnick;Michelle L. Ouellette;Joseph DeSimone;Joseph D. Schmoker;Bruce Leavitt;David Malenka;Yvon Baribeau;Robert Helm;Anthony DiScipio;Gerald L. Sardella;Louis Russo;John D. Klemperer;Reed D. Quinn;Donato Sisto;Donald Likosky;Elaine M. Olmstead;Daniel O'Rourke - 通讯作者:
Daniel O'Rourke
Genetic variation in the carbonic anhydrase isozymes of macaque monkeys. I. The radioimmunosorbent assay
- DOI:
10.1007/bf00485543 - 发表时间:
1973-02-01 - 期刊:
- 影响因子:1.600
- 作者:
Erik Magid;Joseph DeSimone;Richard E. Tashian - 通讯作者:
Richard E. Tashian
Joseph DeSimone的其他文献
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{{ truncateString('Joseph DeSimone', 18)}}的其他基金
U.S.-France Cooperative Research: Nitroxide Assisted Living Free-Radical Polymerization of Block Copolymers in Supercritical Carbon Dioxide (CO2) and Characterization by Light Scat
美法合作研究:氮氧化物辅助嵌段共聚物在超临界二氧化碳(CO2)中的活性自由基聚合及光散射表征
- 批准号:
0089956 - 财政年份:2001
- 资助金额:
$ 2.27万 - 项目类别:
Standard Grant
Center for Environmentally Responsible Solvents and Processes
对环境负责的溶剂和工艺中心
- 批准号:
9876674 - 财政年份:1999
- 资助金额:
$ 2.27万 - 项目类别:
Cooperative Agreement
Materials Synthesis and Processing in Carbon Dioxide
二氧化碳中的材料合成与加工
- 批准号:
9315429 - 财政年份:1994
- 资助金额:
$ 2.27万 - 项目类别:
Continuing Grant
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