Development and Application of 3-D Measurement Methodologies at Reduced Length Scales

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Development and Application of 3D Measurement Methodologies at Reduced Length ScalesAbstractThe development and application of measurement methodologies for quantitative determination of three-dimensional surface deformations on planar or curved objects with spatial resolutions extending to the nanometer scale is the focus of this research effort. A unique aspect of the research is the emphasis on both 3D metrology and also the development of methodologies applicable to generic imaging systems (e.g., SEM, optical) for identification and accurate correction of complex image distortions. Applications of the resulting methodologies will include studies of local deformation behavior in (a) nano-structured materials, (b) micro-scale tensile and bending tests of non-homogeneous materials and (c) this-film blister/bulge specimens undergoing delamination.