Development and Application of 3-D Measurement Methodologies at Reduced Length Scales

发展和应用的三维测量方法在减少长度scalesAbstractThe发展和应用的测量方法的定量测定的三维表面变形的平面或曲面物体的空间分辨率扩展到纳米尺度是这项研究工作的重点。该研究的一个独特方面是强调3D计量和适用于通用成像系统的方法的开发（例如，SEM，光学），用于识别和精确校正复杂的图像失真。所得到的方法的应用将包括局部变形行为的研究（a）纳米结构材料，（B）微观尺度的拉伸和弯曲试验的非均匀材料和（c）这膜泡/隆起试样经历分层。

Development and Application of 3D Measurement Methodologies at Reduced Length ScalesAbstractThe development and application of measurement methodologies for quantitative determination of three-dimensional surface deformations on planar or curved objects with spatial resolutions extending to the nanometer scale is the focus of this research effort. A unique aspect of the research is the emphasis on both 3D metrology and also the development of methodologies applicable to generic imaging systems (e.g., SEM, optical) for identification and accurate correction of complex image distortions. Applications of the resulting methodologies will include studies of local deformation behavior in (a) nano-structured materials, (b) micro-scale tensile and bending tests of non-homogeneous materials and (c) this-film blister/bulge specimens undergoing delamination.