Reactions of Transition Metal Complexes with Silanes and Oxygen. Chemistry in Molecular Approaches to Silicon-Based Microelectronic Materials
过渡金属络合物与硅烷和氧的反应。
基本信息
- 批准号:0212137
- 负责人:
- 金额:$ 37.5万
- 依托单位:
- 依托单位国家:美国
- 项目类别:Continuing Grant
- 财政年份:2002
- 资助国家:美国
- 起止时间:2002-08-01 至 2005-07-31
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
Dr. Ziling B. Xue, Chemistry Department, University of Tennessee, is supported by the Inorganic, Bioinorganic, and Organometallic Chemistry Program of the Chemistry Division for studies of early transition metal-silane chemistry. The reactions of silanes with d0 imides and dn amides will be compared with those of d0 amides to determine how the pi character of the metal-imide bond and the d electron count in the metal-amides influence sigma bond metathesis. To explore the generality of the results obtained with the imides and amides, the study will be extended to reactions between silanes and early transition metal alkoxides. Reactions of the alkoxides with silanes and of metal silyl complexes with oxygen will be developed as new routes to metal-silicon-oxygen phases. In collaboration with scientists at Oak Ridge National Laboratory, the compounds prepared in this investigation will be used as precursors to prepare silicon based microelectronic materials by chemical vapor deposition. During all stages of the project theoretical calculations will be carried out in order to understand the emerging chemistry.The objective of the research is to develop the new precursors and routes to silicon-based microelectronic materials. The first portion of this study will develop fundamental chemistry that is relevant to the preparation of silicon based microelectronic materials. Then chemical processes to yield these advanced microelectronic materials will be developed. These materials include those used as diffusion barriers and high dielectric constant gate materials in very-large-scale-integration (VLSI) devices.
紫玲B医生。薛,化学系,田纳西大学,是由无机,生物无机和有机化学计划的化学部的早期过渡金属硅烷化学研究的支持。 硅烷与d 0酰亚胺和dn酰胺的反应将与d 0酰胺的反应进行比较,以确定金属-酰亚胺键的π特征和金属-酰胺中的d电子数如何影响σ键复分解。为了探索与酰亚胺和酰胺得到的结果的一般性,研究将扩展到硅烷和早期过渡金属醇盐之间的反应。 烷氧基化合物与硅烷的反应以及金属甲硅烷基络合物与氧的反应将被开发为金属-硅-氧相的新途径。与橡树岭国家实验室的科学家合作,在这项调查中制备的化合物将被用作前体,通过化学气相沉积制备硅基微电子材料。在项目的各个阶段,将进行理论计算,以了解新兴的化学。研究的目标是开发新的前体和硅基微电子材料的路线。本研究的第一部分将发展与硅基微电子材料制备相关的基础化学。然后将开发生产这些先进微电子材料的化学工艺。这些材料包括那些在超大规模集成电路(VLSI)器件中用作扩散阻挡层和高介电常数栅极材料的材料。
项目成果
期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
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Ziling Xue其他文献
Ziling Xue的其他文献
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{{ truncateString('Ziling Xue', 18)}}的其他基金
Probing Molecular Quantum Materials by Advanced Spectroscopies
通过先进光谱探测分子量子材料
- 批准号:
2349345 - 财政年份:2024
- 资助金额:
$ 37.5万 - 项目类别:
Continuing Grant
Spectroscopic Investigations of Molecular Quantum Materials. Probing Spin-Phonon Couplings and Intermolecular Magnetic Interactions
分子量子材料的光谱研究。
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2055499 - 财政年份:2021
- 资助金额:
$ 37.5万 - 项目类别:
Continuing Grant
Spectroscopic Studies of Single-Ion Magnets
单离子磁体的光谱研究
- 批准号:
1900296 - 财政年份:2019
- 资助金额:
$ 37.5万 - 项目类别:
Standard Grant
EAGER: Probing Single-Ion Magnets by Raman and Far-Infrared Spectroscopies
EAGER:通过拉曼光谱和远红外光谱探测单离子磁体
- 批准号:
1633870 - 财政年份:2016
- 资助金额:
$ 37.5万 - 项目类别:
Standard Grant
Investigating Novel Reactivities of Transition Metal Complexes and Pathways in the Formation of Microelectronic Materials
研究过渡金属配合物的新反应活性和微电子材料形成的途径
- 批准号:
1362548 - 财政年份:2014
- 资助金额:
$ 37.5万 - 项目类别:
Continuing Grant
Reactions of Transition Metal Complexes with Oxygen and Water. Investigating the Nature of the Reactions and Pathways to Microelectronic Materials
过渡金属络合物与氧和水的反应。
- 批准号:
1012173 - 财政年份:2010
- 资助金额:
$ 37.5万 - 项目类别:
Continuing Grant
Probing Novel Reactivities of Transition Metal Complexes and Mechanistic Pathways in the Formation of Microelectronic Materials
探索过渡金属配合物的新反应活性和微电子材料形成的机理途径
- 批准号:
0516928 - 财政年份:2005
- 资助金额:
$ 37.5万 - 项目类别:
Continuing Grant
Reactions of Silanes with Coordinated Ligands: Mechanistic Studies of Molecular Routes to Metal Silicides
硅烷与配位配体的反应:金属硅化物分子路线的机理研究
- 批准号:
9904338 - 财政年份:1999
- 资助金额:
$ 37.5万 - 项目类别:
Continuing Grant
NSF Young Investigator: Metal Silicides and Catalytic Formation Polysilanes
NSF 青年研究员:金属硅化物和催化形成聚硅烷
- 批准号:
9457368 - 财政年份:1994
- 资助金额:
$ 37.5万 - 项目类别:
Continuing Grant
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