Probing Novel Reactivities of Transition Metal Complexes and Mechanistic Pathways in the Formation of Microelectronic Materials

薛子凌博士得到化学系无机、生物无机和有机物项目的支持，研究d 0过渡金属络合物与氧、水和氢硅烷的反应。具体而言，三重态和单线态氧与第4、5和6族金属的酰亚胺、酰胺、醇盐、亚烷基、亚烷基炔和相关络合物的反应将被表征和机械评估。 此外，将研究这些金属的醇盐与氢硅烷的反应。为了提供与涉及O2和氢化硅烷的反应的比较，将评估水与过渡金属络合物的反应作为金属氧化物（MOn）和金属硅酸盐（M-Si O）的路线。这些研究将确定微电子MOn和M-Si-O材料的机械路径。 MOn和M-Si-O物种作为高介电常数栅极材料和作为动态随机存取存储器器件的电容器材料具有很大的电流兴趣。在这个项目中将要研究的反应是已知的，以产生薄的MOn和M-Si-O薄膜，分别通过化学气相沉积。该项目将系统化这些制备的细节并确定反应的机制。这将为开发微电子材料的新途径提供必要的基础知识。此外，该研究将提供化学和材料科学的本科生，研究生和博士后学生的培训。女性和代表性不足的少数民族学生将参加该项目。

Dr. Ziling (Ben) Xue is supported by the Inorganic, Bioinorganic, and Organometallic Programof the Chemistry Division for the study of the reactions of d0 transition metal complexes with oxygen, water, and hydrosilanes. Specifically, the reaction of triplet and singlet oxygen with imides, amides, alkoxides, alkylidenes, alkylidynes, and related complexes of group 4, 5, and 6 metals will be characterized and mechanistically evaluated. Additionally, the reactions of the alkoxides of these metals with hydrosilanes will be investigated. To provide a comparison to the reactions involving O2 and hydrosilanes, the reactions of water with transition metal complexes will be evaluated as routes to metal oxides (MOn) and metal silicates (M-Si O). These investigations will define mechanistic pathways to microelectronic MOn and M-Si-O materials. There is much current interest in MOn and M-Si-O species as high dielectric constant gate materials and as capacitor materials for dynamic random access memory devices. The reactions that will be studied in this project are known to yield thin MOn and M-Si-O films, respectively, by chemical vapor deposition. This project will systematize the details of these preparations and determine the mechanisms of the reactions. This will provide the foundational knowledge necessary to develop new routes to microelectronic materials. Additionally, the research will provide training of undergraduate, graduate, and postdoctoral students in chemistry and materials science. Female and underrepresented minority students will participate in the project.