Probing Novel Reactivities of Transition Metal Complexes and Mechanistic Pathways in the Formation of Microelectronic Materials

探索过渡金属配合物的新反应活性和微电子材料形成的机理途径

• 批准号: 0516928
• 负责人: Ziling Xue
• 金额: --
• 依托单位: University of Tennessee Knoxville
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-08-01 至 2011-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0516928&HistoricalAwards=false
• 关键词: Probing; Novel; Reactivities; Transition; Metal

Dr. Ziling (Ben) Xue is supported by the Inorganic, Bioinorganic, and Organometallic Programof the Chemistry Division for the study of the reactions of d0 transition metal complexes with oxygen, water, and hydrosilanes. Specifically, the reaction of triplet and singlet oxygen with imides, amides, alkoxides, alkylidenes, alkylidynes, and related complexes of group 4, 5, and 6 metals will be characterized and mechanistically evaluated. Additionally, the reactions of the alkoxides of these metals with hydrosilanes will be investigated. To provide a comparison to the reactions involving O2 and hydrosilanes, the reactions of water with transition metal complexes will be evaluated as routes to metal oxides (MOn) and metal silicates (M-Si O). These investigations will define mechanistic pathways to microelectronic MOn and M-Si-O materials. There is much current interest in MOn and M-Si-O species as high dielectric constant gate materials and as capacitor materials for dynamic random access memory devices. The reactions that will be studied in this project are known to yield thin MOn and M-Si-O films, respectively, by chemical vapor deposition. This project will systematize the details of these preparations and determine the mechanisms of the reactions. This will provide the foundational knowledge necessary to develop new routes to microelectronic materials. Additionally, the research will provide training of undergraduate, graduate, and postdoctoral students in chemistry and materials science. Female and underrepresented minority students will participate in the project.

Ziling（BEN）XUE博士得到了化学分部的无机，生物启示和有机金属计划的支持，用于研究D0过渡金属复合物与氧，水和氢烷的反应。具体而言，将对第4、5金属的三重氧化物，烷氧化物，烷基乙烯，烷基肾上腺，烷基肾上腺和相关复合物的反应与4、5和6金属的相关复合物进行表征和机械评估。 此外，将研究这些金属的烷氧化物与氢硅烷的反应。为了与涉及O2和水硅烷的反应进行比较，将评估水与过渡金属配合物的反应，作为与金属氧化物（MON）和金属硅酸盐（M-SI O）的路线。这些研究将定义微电子MON和M-SI-O材料的机械途径。 当前对MON和M-SI-O物种作为高介电恒定栅极材料以及动态随机访问记忆设备的电容器材料引起了很多兴趣。已知该项目中将研究的反应分别通过化学蒸气沉积产生薄的MON和M-SI-O膜。该项目将系统化这些制剂的细节，并确定反应的机制。这将提供开发新途径到微电源材料的必要基础知识。此外，该研究将提供化学和材料科学的本科生，研究生和博士后学生的培训。女性和代表性不足的少数民族学生将参加该项目。