Probing Novel Reactivities of Transition Metal Complexes and Mechanistic Pathways in the Formation of Microelectronic Materials

探索过渡金属配合物的新反应活性和微电子材料形成的机理途径

• 批准号: 0516928
• 负责人: Ziling Xue
• 金额: --
• 依托单位: University of Tennessee Knoxville
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-08-01 至 2011-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0516928&HistoricalAwards=false
• 关键词: Probing; Novel; Reactivities; Transition; Metal

Dr. Ziling (Ben) Xue is supported by the Inorganic, Bioinorganic, and Organometallic Programof the Chemistry Division for the study of the reactions of d0 transition metal complexes with oxygen, water, and hydrosilanes. Specifically, the reaction of triplet and singlet oxygen with imides, amides, alkoxides, alkylidenes, alkylidynes, and related complexes of group 4, 5, and 6 metals will be characterized and mechanistically evaluated. Additionally, the reactions of the alkoxides of these metals with hydrosilanes will be investigated. To provide a comparison to the reactions involving O2 and hydrosilanes, the reactions of water with transition metal complexes will be evaluated as routes to metal oxides (MOn) and metal silicates (M-Si O). These investigations will define mechanistic pathways to microelectronic MOn and M-Si-O materials. There is much current interest in MOn and M-Si-O species as high dielectric constant gate materials and as capacitor materials for dynamic random access memory devices. The reactions that will be studied in this project are known to yield thin MOn and M-Si-O films, respectively, by chemical vapor deposition. This project will systematize the details of these preparations and determine the mechanisms of the reactions. This will provide the foundational knowledge necessary to develop new routes to microelectronic materials. Additionally, the research will provide training of undergraduate, graduate, and postdoctoral students in chemistry and materials science. Female and underrepresented minority students will participate in the project.

薛子凌博士在化学部无机、生物无机和有机金属项目的支持下，研究d0过渡金属配合物与氧、水和氢硅烷的反应。具体来说，将对三线态和单线态氧与酰亚胺、酰胺、醇盐、亚烷基、亚烷基以及第 4、5 和 6 族金属的相关络合物的反应进行表征和机理评估。 此外，还将研究这些金属的醇盐与氢硅烷的反应。为了与涉及 O2 和氢硅烷的反应进行比较，将评估水与过渡金属络合物的反应，作为生成金属氧化物 (MOn) 和金属硅酸盐 (M-Si O) 的途径。这些研究将确定微电子 MOn 和 M-Si-O 材料的机理途径。 目前人们对 MOn 和 M-Si-O 物质作为高介电常数栅极材料和动态随机存取存储器件的电容器材料非常感兴趣。已知该项目将研究的反应可通过化学气相沉积分别产生薄 MOn 和 M-Si-O 薄膜。该项目将系统化这些制备的细节并确定反应机制。这将为开发微电子材料新途径提供必要的基础知识。此外，该研究还将为化学和材料科学领域的本科生、研究生和博士后提供培训。女性和代表性不足的少数族裔学生将参与该项目。