Reactions of Transition Metal Complexes with Oxygen and Water. Investigating the Nature of the Reactions and Pathways to Microelectronic Materials

过渡金属络合物与氧和水的反应。

• 批准号: 1012173
• 负责人: Ziling Xue
• 金额: $ 42万
• 依托单位: University of Tennessee Knoxville
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-09-01 至 2014-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1012173&HistoricalAwards=false
• 关键词: Reactions; Transition; Metal; Complexes; Oxygen

This award in the Chemical Synthesis (SYN) program supports work by Professor Zi-Ling (Ben) Xue at the University of Tennessee, Knoxville, to carry out fundamental studies of the reactions of transition metal complexes with oxygen and water. Competitive oxidation in the complexes by oxygen and their gradual conversion to metal oxides by oxygen and water will be investigated. The properties of reaction intermediates will be investigated, and thermodynamic and kinetic data will be gathered to understand their conversion to metal oxides. A mentoring program through the University of Tennessee Math and Science Center will help advance the careers of first-generation college students in Tennessee and attract them to the sciences. The studies will also help develop the research infrastructure in Tennessee, an EPSCoR (Experimental Program to Stimulate Competitive Research) state.The reactions to be studied here have been used in chemical vapor deposition/atomic layer deposition processes to make the state-of-the-art microelectronic metal oxides that are a key component of the newest and smallest transistors. An understanding of the basic chemistry of the reactions may lead to better precursors for and new chemical routes to the microelectronic materials.

化学合成(SYN)项目的这一奖项支持田纳西大学诺克斯维尔分校的薛子玲(Ben)教授开展过渡金属络合物与氧气和水反应的基础研究。将研究络合物中氧的竞争氧化以及它们被氧和水逐步转化为金属氧化物。将研究反应中间体的性质，并收集热力学和动力学数据，以了解它们转化为金属氧化物的情况。田纳西大学数学与科学中心的一项指导计划将有助于推进田纳西州第一代大学生的职业生涯，并吸引他们投身科学领域。这些研究还将有助于发展田纳西州的研究基础设施，田纳西州是EPSCoR(刺激竞争研究的实验计划)州。这里要研究的反应已被用于化学气相沉积/原子层沉积工艺，以制造最先进的微电子金属氧化物，这是最新和最小晶体管的关键组件。对反应的基本化学的了解可能会导致更好的微电子材料的前体和新的化学路线。