Miniaturized MEMS Based Fiber Optic Distributed Health monitoring System for Civil Structures

主要研究者姓名和机构：Farhad Ansari，伊利诺伊大学芝加哥分校提案编号：0220036提案标题：小型化基于MEMS的光纤分布式健康监测系统的土木结构项目摘要拟议研究的主要目标是发展能力，大量的传感器在一个非常紧凑和便携式的方式在土木结构中的应用。 这将通过将传感器系统的所有硬件组件（包括光学干涉仪和微处理器模块）压缩到单个小型化单元中来实现。 微制造方法将用于微机电系统（MEMS）的开发，其中包括波导，微机械光开关和旋转微镜。 该系统将驱动一系列分布式光纤传感器，用于在大的传感范围内感测结构扰动。 将庞大的系统转换成小型化的MEMS器件将允许MEMS传感器模块的大规模生产，以根据需要集成在结构内。 传感系统将提供对过度应变、裂纹、分层、偏转、不均匀载荷分布、热冲击、冲击载荷和腐蚀的监测能力。本研究的成果将对包括建筑物、桥梁、水坝、隧道、海港、公路、管道、铁路和发电站等无数设施在内的公共工程基础设施系统的安全、维护和有效运营产生巨大影响。 这项研究将为土木工程专业的学生提供新的教育机会，因为他们将学习开发和使用现代工具来解决国家公共工程基础设施的重要问题。参与该项目的学生将通过接触工程的不同研究领域，特别是传感器技术，MEMS，结构测试和微型器件的工业封装受益匪浅。

PI Name and Institution: Farhad Ansari, University of Illinois at ChicagoProposal Number: 0220036Proposal Title: Miniaturized MEMS Based Fiber Optic Distributed Health monitoring System for Civil Structures Project AbstractThe primary objective of the proposed research is to develop capability for application of large numbers of sensors in a very compact and portable manner in civil structures. This will be accomplished by condensing all the hardware components of the sensor system, which includes optical interferometer, and microprocessor modules into a single miniaturized unit. The micro fabrication methodologies will be employed for development of the Micro Electro Mechanical Systems (MEMS), which will include wave-guides, and micro mechanical optical switches and rotating micro mirrors. This system will drive a series of distributed optical fiber sensors designed for sensing of structural perturbations within a large sensing range. Conversion of the bulky system into the miniaturized MEMS device will allow for mass production of MEMS-sensor modules for integration within structures as needed. The sensory system will provide monitoring capabilities for excessive strains, cracks, delaminations, deflections, uneven load distributions, thermal shocks, impact loads, and corrosion. The outcomes of this research will have a tremendous impact on safety, maintenance, and efficient operation of the public works infrastructure systems that include myriads of facilities such as buildings, bridges, dams, tunnels, seaports, highways, pipelines, railroads, and power generation stations. This research will provide new educational opportunities for civil engineering students, as they will learn to develop and work with modern tools to solve problems of great importance for the nation's public works infrastructure. Students involved in this project will benefit greatly by exposure to different research areas of engineering, particularly sensor technology, MEMS, structural testing, and industrial packaging of micro devices.