CAREER: High Force, High Speed Electro-Thermal Micro-Actuators: Design, Fabrications, and Applications

职业:高力、高速电热微执行器:设计、制造和应用

基本信息

项目摘要

The absence of suitable actuators limits the development of silicon-based microsystems. For in-plane actuation, the best contenders are electrostatic and thermal actuators, but the former require high drive voltages, and both deliver forces in the range of only about 1-10 uN. This proposal addresses a new class of electrothermal microactuators that promises 100X increase force and 10X reduction in drive voltage. They leverage deformations caused by localized thermal stresses to efficiently produce large forces without compromising displacement.The devices will be designed by two complementary approaches, and further refined by numerical analysis in conjunction with optimal design of experiments. Designs that offer rectilinear, circular and customized loci of motion will be developed and evaluated for performance criteria such as output force and displacement, input power, drive voltage, response speed, device lifetime, trajectory errors, mechanical vibration, etc. Time-sequenced engines such as inchworms, which offer high displacement and force with negligible standby power, will also be developed. Designs will be fabricated in multiple technologies to permit comparative evaluations of performance and degradation mechanisms. Maskless process variations are proposed for standard technologies for selective confinement of heat and current flux, which minimize power consumption and response time.Preliminary results indicate that static displacements 100 microns and peak forces 1 mN are feasible with standard technologies. Several applications are proposed, with complementary demands on various performance aspects: a positioner for scanning probe microscopy; a positioner for optical elements in a micro-optomechanical system; and a sliding shunt for high-frequency telecommunication systems. In the long term these actuators will also be used to develop haptic interfaces, e.g. for simulating microsurgery.One educational objective is to increase the participation of under-represented groups in the MEMS research community using early recruitment programs and interaction with student groups. Another is to facilitate interdisciplinary education using practical engineering projects that force the convergence of multiple specialties to fill the pedagogical gaps between relevant departments. These efforts will be reinforced by interactions with industry.
缺乏合适的致动器限制了硅基微系统的发展。对于面内驱动,最好的竞争者是静电和热执行器,但前者需要高驱动电压,并且两者都只提供大约1-10un的力。这项提议针对的是一种新型的电热式微执行器,它承诺将驱动力增加100倍,驱动电压降低10倍。它们利用局部热应力引起的变形,在不影响位移的情况下有效地产生大的力。装置将通过两种互补的方法设计,并通过数值分析和优化实验设计来进一步完善。将开发提供直线、圆形和定制运动轨迹的设计,并针对输出力和位移、输入功率、驱动电压、响应速度、设备寿命、轨迹误差、机械振动等性能标准进行评估。还将开发时序发动机,如尺寸虫,它们提供高位移和力,待机功率可忽略不计。设计将采用多种技术,以便对性能和退化机制进行比较评估。提出了用于选择限制热流密度的标准工艺的无掩模工艺变化,以最小化功耗和响应时间。初步结果表明,采用标准工艺,静态位移为100微米,峰值力为1 mN是可行的。提出了几种应用,在不同的性能方面具有互补的需求:用于扫描探针显微镜的定位器;用于微光学机械系统中的光学元件的定位器;以及用于高频电信系统的滑动分流器。从长远来看,这些致动器还将用于开发触觉界面,例如用于模拟显微手术。教育目标之一是通过早期招募计划和与学生群体的互动,增加MEMS研究社区中代表性不足的群体的参与。另一个是利用实际工程项目促进跨学科教育,这些项目迫使多个专业融合,以填补相关部门之间的教学空白。这些努力将通过与工业界的互动得到加强。

项目成果

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Yogesh Gianchandani其他文献

Yogesh Gianchandani的其他文献

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{{ truncateString('Yogesh Gianchandani', 18)}}的其他基金

Workshop on Nano/Micro Manufacturing: Translational Research, Applications, and Industry Needs, at Ford Motor Conference Center in Dearborn, Michigan. (Date to be determined).
纳米/微制造研讨会:转化研究、应用和行业需求,在密歇根州迪尔伯恩的福特汽车会议中心举行。
  • 批准号:
    1249348
  • 财政年份:
    2012
  • 资助金额:
    $ 18.55万
  • 项目类别:
    Standard Grant
EAGER: Micromachined Sensors for Multi-functional and Autonomous Analysis of Geofluids: A New Approach to the Design and Performance of Chemical Sensors in Extreme Environments
EAGER:用于地质流体多功能和自主分析的微机械传感器:极端环境中化学传感器设计和性能的新方法
  • 批准号:
    1043063
  • 财政年份:
    2010
  • 资助金额:
    $ 18.55万
  • 项目类别:
    Standard Grant
Microplasma for Dry Etching: New Approaches for Micro and Nano Systems
用于干蚀刻的微等离子体:微纳米系统的新方法
  • 批准号:
    0233174
  • 财政年份:
    2002
  • 资助金额:
    $ 18.55万
  • 项目类别:
    Standard Grant
Microplasma for Dry Etching: New Approaches for Micro and Nano Systems
用于干蚀刻的微等离子体:微纳米系统的新方法
  • 批准号:
    0100366
  • 财政年份:
    2001
  • 资助金额:
    $ 18.55万
  • 项目类别:
    Standard Grant
Partial Travel Support for US Students Attending the MEMS 2000 Conference
为参加 MEMS 2000 会议的美国学生提供部分旅行支持
  • 批准号:
    0000375
  • 财政年份:
    2000
  • 资助金额:
    $ 18.55万
  • 项目类别:
    Standard Grant
CAREER: High Force, High Speed Electro-Thermal Micro-Actuators: Design, Fabrications, and Applications
职业:高力、高速电热微执行器:设计、制造和应用
  • 批准号:
    9985422
  • 财政年份:
    2000
  • 资助金额:
    $ 18.55万
  • 项目类别:
    Standard Grant

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