EAGER: Micromachined Sensors for Multi-functional and Autonomous Analysis of Geofluids: A New Approach to the Design and Performance of Chemical Sensors in Extreme Environments

EAGER：用于地质流体多功能和自主分析的微机械传感器：极端环境中化学传感器设计和性能的新方法

• 批准号: 1043063
• 负责人: Yogesh Gianchandani
• 金额: $ 5.18万
• 依托单位: Regents of the University of Michigan - Ann Arbor
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2010
• 资助国家: 美国
• 起止时间: 2010-08-01 至 2012-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=1043063&HistoricalAwards=false
• 关键词: EAGER; Micromachined; Sensors; Multi; functional

This EAGER project uses newly developed micro-ultrasonic and micro-electro-discharge machining methods to develop rapid prototyping of a new generation of nano-enabled sensors. If successful, the work will both dramatically expand available options for lithography-compatible, batch-mode microfabrication of ceramic and metal microstructures and provide new technology allowing the development of new, more sensitive, and more robust environmental sensors for aquatic environments. Recently developed lithography-compatible micromachining techniques will be explored, with the goal of decreasing the thickness and increasing the sensitivity and spatial resolution of protonic ceramic membranes, such as yttrium-stabilized zirconia (YST), a ceramic used in pH and redox sensor electrodes that are used to make measurements in high temperature (400 degree C) corrosive environments (seawater). Broader impacts of the work include the collaboration of researchers from three fields that do not commonly interact (nan-manufacturing, geoscience, and biology), development of new infrastructure for science engineering, and the potential for dramatically improving aquatic sensor sensitivity and longevity even in harsh environmental conditions like those found in seafloor hydrothermal vents. Student training in novel, state-of-the-art manufacturing techniques and nanotechnology is also involved.

EAGER项目使用新开发的微超声和微放电加工方法来开发新一代纳米传感器的快速原型。 如果成功，这项工作将大大扩展陶瓷和金属微结构的光刻兼容的批量模式微制造的可用选项，并提供新技术，允许开发新的，更灵敏，更强大的环境传感器用于水生环境。 最近开发的光刻兼容的微机械加工技术将被探索，以减少厚度和增加的灵敏度和质子陶瓷膜的空间分辨率的目标，如钇稳定氧化锆（YST），用于pH和氧化还原传感器电极，用于在高温（400摄氏度）腐蚀性环境（海水）进行测量的陶瓷。这项工作的更广泛影响包括来自三个通常不相互作用的领域（纳米制造，地球科学和生物学）的研究人员的合作，科学工程新基础设施的开发，以及即使在海底热液喷口等恶劣环境条件下也有可能显着提高水生传感器的灵敏度和寿命。 学生在新的，国家的最先进的制造技术和纳米技术的培训也参与。