SBIR Phase I: MicroElectroMechanical Systems (MEMS) Wavefront Correction Device for Ophthalmic Adaptive Optics

该小型企业创新研究(SBIR)第一阶段项目旨在设计和提供一种用于眼科自适应光学系统的低成本、基于MEMS的波前校正设备。自适应光学在眼科中的应用显示出巨大的前景，但缺乏合适的高性价比解决方案阻碍了研究的推进和相关商业市场的发展。MEMX将利用当今最先进的表面微加工技术，首次设计和交付满足视觉科学界指定的所有要求的MEMS波前校正芯片。在这个项目中，将创建一些设计概念并进行充分的分析，之后将根据眼科需求制作并测试基线设计。该项目的主要商业应用是在眼科设备和仪器领域。其他应用将包括光学相干层析成像、共焦显微镜、便携式军事成像系统、自由空间光通信系统和半导体光刻。

This Small Business Innovation Research (SBIR) Phase I project is to design and deliver a low cost, MEMS- based wavefront correction device for use in ophthalmic adaptive optics systems. The use of adaptive optics in ophthalmics shows great promise, but the lack of suitable cost-effective solutions has hindered the advance of research and the development of associated commercial markets. MEMX will leverage the most sophisticated surface micromachining technology available today to design and deliver, for the first time, a MEMS wavefront correction chip that addresses all of the requirements specified by the vision science community. In this project, a number of design concepts will be created and fully analyzed, after which a baseline design will be fabricated and tested against ophthalmic requirements.The main commercial application of this project is in the area of ophthalmic devices and instrumentation. Additional applications would include optical coherence tomography, confocal microscopy, portable military imaging systems, free space optical communication systems, and semiconductor lithography.