SBIR Phase II: MicroElectroMechanical Systems (MEMS) Wavefront Correction Device for Ophthalmic Adaptive Optics

本小型企业创新研究（SBIR）二期项目旨在开发一种用于眼科自适应光学的MEMS波前校正装置。自适应光学在眼科中的应用显示出巨大的前景，但缺乏合适的成本效益解决方案阻碍了研究的进展和相关商业市场的发展。这项工作将利用最复杂的表面微加工技术来设计和交付，这是第一次，一个MEMS波前校正芯片，满足视觉科学界规定的所有要求。该项目的商业应用将在眼科领域。眼科设备供应商需要低成本的波前校正设备，用于下一代光镜和自折射镜、LASIK预览系统和高分辨率眼底成像系统。低成本波前矫正设备的眼科市场，一旦这种设备可用，预计每年至少有2000万美元。这种装置也可以在眼科以外的领域使用。光学相干层析成像、共聚焦显微镜、便携式军事成像系统、自由空间光通信系统和半导体光刻是波前校正装置的其他潜在应用领域。

This Small Business Innovation Research (SBIR) Phase II project proposes to develop a MEMS wavefront correction device for ophthalmic adaptive optics. The use of adaptive optics in ophthalmics shows great promise, but the lack of suitable cost-effective solutions has hindered the advance of research and the development of associated commercial markets. The proposed work will leverage the most sophisticated surface micromachining technology available to design and deliver, for the first time, a MEMS wavefront correction chip that addresses all of the requirements specified by the vision science community. The commercial application of this project will be in the area of ophthalmology. Ophthalmic equipment suppliers need low cost wavefront correction devices for use in next generation phoropters and autorefractors, LASIK preview systems, and high resolution fundus imaging systems. The ophthalmic market for low cost wavefront correction devices, once such devices are available, is projected to be at least $20 million per year. Such devices may also have utility outside of ophthalmics. Optical coherence tomography, confocal microscopy, portable military imaging systems, free space optical communication systems, and semiconductor lithography are other potential application areas for wavefront correction devices.