SBIR Phase I: Low-Pressure Microplasma Gas Analyzer

SBIR 第一阶段：低压微等离子体气体分析仪

• 批准号: 0319494
• 负责人: Chris Doughty
• 金额: $ 10万
• 依托单位: Verionix
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-07-01 至 2003-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0319494&HistoricalAwards=false
• 关键词: SBIR; Phase; Low; Pressure; Microplasma

This Small Business Innovation Research Phase I project will demonstrate the feasibility of a gas analyzer based on microplasma emission. Current technologies capable of identifying and quantifying gas partial pressures are not well suited to operation in the 1 mTorr to 1 Torr pressure regime typically used in semiconductor and other vacuum processing. The gas analyzer proposed here would vastly improve the quality of process diagnostics and control, and allow for cost effective real time control in a variety of industries. This project will investigate scaling of microplasma sources to low pressures and small dimensions as well as optical diagnostics of these novel plasma. A gas analysis system capable of operation at 10mTorr, ppm detection limit, power consumption 5 W, and occupying a volume of 2000 cm3 will be demonstrated. The gas analyzer will immediately be applied in semiconductor manufacturing where it will be used for wafer qualification, system fingerprinting, process diagnostics and control, and as a monitor of system emissions. Spin-offs into other industries which utilize vacuum processing (data storage, industrial coating, etc) as well as into scientific apparatus can be expected.

该小型企业创新研究第一阶段项目将展示基于微等离子体发射的气体分析仪的可行性。 当前能够识别和量化气体分压的技术不太适合在半导体和其他真空处理中通常使用的 1 mTorr 至 1 Torr 压力范围内运行。 这里提出的气体分析仪将极大地提高过程诊断和控制的质量，并允许在各种行业中实现具有成本效益的实时控制。该项目将研究微等离子体源的低压和小尺寸缩放以及这些新型等离子体的光学诊断。将展示能够在 10mTorr、ppm 检测限、功耗 5 W、体积 2000 cm3 下运行的气体分析系统。 该气体分析仪将立即应用于半导体制造，用于晶圆鉴定、系统指纹识别、过程诊断和控制以及系统排放监测。 预计会分拆到利用真空处理的其他行业（数据存储、工业涂层等）以及科学仪器。