SBIR Phase I: Trapping Particle Detector for On-Line Monitoring

SBIR 第一阶段：用于在线监测的捕获粒子探测器

• 批准号: 0539309
• 负责人: Chris Doughty
• 金额: $ 10万
• 依托单位: Verionix
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2006
• 资助国家: 美国
• 起止时间: 2006-01-01 至 2006-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0539309&HistoricalAwards=false
• 关键词: SBIR; Phase; Trapping; Particle; Detector

This Small Business Innovation Research (SBIR) Phase I project will develop improved particle detectors for monitoring of semiconductor manufacturing tools. This detection technology will increase count rates for greater than 0.2 micron diameter particles by 100 to 1000 times improving correlations between the particle detector and wafer by greater than 10 times. For smaller particles this detector will enable detection, ultimately to the nanoparticle regime (less than 25 nanometers). The intellectual merit of this proposal is that it will advance the state of knowledge in the field of engineering and physics of microplasmas. It will broaden knowledge of plasma scaling and of the behavior of particles in plasmas. This proposal will improve the performance of semiconductor process tool manufacturer's products by enabling cost-effective, real-time monitoring. Commercially, the broad economic benefit of this program will be to enhance the competitiveness of domestic semiconductor manufacturers. Particle issues account for approximately 11% of manufacturing tool downtime and are a major cause of scrap and yield losses. This technology will have spin-out benefits for the entire nanotechnology field. By enhancing the small particle performance limit of detection it will enable nanotech researchers and manufacturers to address safety issues related to nanoparticle production.

该小型企业创新研究（SBIR）第一阶段项目将开发用于监测半导体制造工具的改进型粒子探测器。这种检测技术将使直径大于0.2微米的颗粒的计数率提高100至1000倍，使颗粒检测器和晶片之间的相关性提高10倍以上。对于较小的颗粒，该检测器将能够检测，最终达到纳米颗粒范围（小于25纳米）。这一建议的智力价值在于，它将推进微等离子体工程和物理领域的知识状态。它将拓宽等离子体定标和等离子体中粒子行为的知识。该建议将通过实现成本效益高的实时监控来改善半导体工艺工具制造商的产品的性能。从商业上讲，这一计划的广泛经济效益将是提高国内半导体制造商的竞争力。颗粒问题约占制造工具停机时间的11%，是废品和产量损失的主要原因。这项技术将为整个纳米技术领域带来附带利益。通过提高小颗粒的检测性能极限，它将使纳米技术研究人员和制造商能够解决与纳米颗粒生产相关的安全问题。