SBIR Phase II: Low-Pressure Microplasma Gas Analyzer

SBIR 第二阶段：低压微等离子体气体分析仪

• 批准号: 0422076
• 负责人: Chris Doughty
• 金额: $ 50万
• 依托单位: Verionix
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-08-01 至 2007-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0422076&HistoricalAwards=false
• 关键词: SBIR; Phase; II; Low; Pressure

This Small Business Innovation Research (SBIR) Phase II research project will develop a miniaturized gas analyzer for use in industrial process control, fault detection and monitoring. The gas analyzer proposed here would be able to identify the chemical components of the gas and quantify their partial pressures down to part-per-million (ppm) levels. It will be sensitive to a range of gas species, and be small, have low power consumption and low cost.The broader impact of this research project will be to advance the nation's scientific and intellectual knowledge base by developing and demonstrating novel plasma emission sources and their applications. It will advance the nation's economic competitiveness by enhancing industrial productivity and the ability of the US semiconductor capital equipment industry to compete worldwide.

小型企业创新研究（SBIR）第二阶段研究项目将开发一种用于工业过程控制，故障检测和监控的小型气体分析仪。这里提出的气体分析仪将能够识别气体的化学成分，并将其分压量化到百万分之一（ppm）水平。它将对一系列气体种类敏感，体积小，功耗低，成本低。该研究项目的更广泛影响将是通过开发和展示新型等离子体发射源及其应用，推进国家的科学和知识基础。 它将通过提高工业生产率和美国半导体资本设备行业在全球范围内的竞争力来提高美国的经济竞争力。