SBIR Phase II: Low-Pressure Microplasma Gas Analyzer

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This Small Business Innovation Research (SBIR) Phase II research project will develop a miniaturized gas analyzer for use in industrial process control, fault detection and monitoring. The gas analyzer proposed here would be able to identify the chemical components of the gas and quantify their partial pressures down to part-per-million (ppm) levels. It will be sensitive to a range of gas species, and be small, have low power consumption and low cost.The broader impact of this research project will be to advance the nation's scientific and intellectual knowledge base by developing and demonstrating novel plasma emission sources and their applications. It will advance the nation's economic competitiveness by enhancing industrial productivity and the ability of the US semiconductor capital equipment industry to compete worldwide.