Development of Instrumentation for Measurement of Microscopic Dynamic Motions in Physical Systems

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AbstractDynamic behavior of microelectromechanical systems (MEMS), microscopic weld-zone dynamics duringultrasonic welding, sonic-infrared imaging for non-destructive evaluation of cracks, vibration-assistedprocessing of nanocomposites and imaging of microscopic vibro-acoustic sources are all subjects of currentor proposed multidisciplinary research programs at Wayne State University (WSU), and all of theseresearch efforts would be significantly enhanced by adding the capability for precise measurement ofcomplex high frequency microscopic motions and the distribution of those motions over finite regions inphysical systems. Such measurement capabilities are not currently available at WSU, and this projectaddresses that need by outlining a program for systematic acquisition and development of new instruments.The acquisition and development activities are tightly integrated. The micro scanning laser vibrometer has the capability to perform full modal analyses related to out-of-planemotions in micron-sized regions, while the new 3-D Nano-imager will be developed to provide full 3-Dmotion measurements of nanometer-sized regions. The proposed 3-D Nano-imager will be developedusing two methods, a new optical measuring method based on the inverse scattering phase retrieval, andstroboscopic interferometer based three dimensional (3D) measurement technology. Both systems areneeded for the following reasons; (1) motion measurements generated by the newly developed 3-D Nano-Imagersystem must be validated by comparison with independent measurements, and the micro scanninglaser vibrometer system would provide that validation capability, (2) the micro scanning laser vibrometersystem can measure out-of-plane motions of micron-sized systems, whereas the developed 3-D Nano-Imagersystem will extend the measurement capabilities to full 3-D motions of nanometer-sized systems,(3) the micro scanning laser vibrometer system would be available for our research immediately uponpurchase and installation, whereas it is anticipated that the development of the 3-D Nano-Imager systemwill take at least one year, (4) both systems can be used to some degree in all of the research projectsdescribed in this proposal. The outcome of the research conducted with the requested instruments will addsignificantly to the knowledge base in the areas of MEMS devices, sensors based testing, ultrasonicwelding, nondestructive testing of materials and structures, processing of nanocomposites, and imaging ofnoise and vibration sources. Graduate and undergraduate students will be trained in state-of-the-arttechniques using state-of-the-art instruments. The results of the research will also be a source of course projects for a large pool of local engineers, undergraduate and graduate students, particularly from underrepresented groups.