GOALI: A Symmetry-Based Group Theory Approach to Data Reduction for Micro-Optics Manufacturing

GOALI：一种基于对称群论的微光学制造数据缩减方法

• 批准号: 0323505
• 负责人: Angela Davies
• 金额: $ 23.63万
• 依托单位: University of North Carolina at Charlotte
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-09-01 至 2007-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0323505&HistoricalAwards=false
• 关键词: GOALI; Symmetry; Based; Group; Theory

This Grant Opportunity for Academic Liaison with Industry (GOALI) award provides funding for the development of a symmetry-based data analysis strategy for imaging processing in micro-optics manufacturing. Reducing each image to a small set of numbers based on the symmetry properties of the image will enable a strong correlation between the metrology and both the key manufacturing variables and component performance. The analysis strategy will be based on removing the intended shape of the lens from the measurement, followed by symmetry operations and data reduction methods. Working with industry, the analysis tools will be developed and applied to interferometric measurements of micro-refractive lenses that are photolithographically manufactured to allow correlation between part characterization and performance such as coupling efficiency, in addition to key manufacturing parameters such as photo resist thickness and etch rates. A corresponding measurement and analysis uncertainty will also be a critical component of the research.If successful, the work will allow the physics of the manufacturing process to be correlated to the measurement, leading to optimum process feedback. This will significantly improve the manufacturing of micro-refractive lenses, improving device yield, reducing testing time and cost, and ultimately reducing device cost. Broad dissemination and acceptance by the manufacturing community is ensured by ultimately incorporating the methodology into commercial instrumentation software; demonstrating viability through journal publications, conference presentations, and industry-sponsored technical seminars; developing a continuing education workshop and an advanced laboratory module for undergraduate and graduate education through the Education and Training Facility under the Center for Optoelectronics and Optical Communications at UNC Charlotte; and incorporating the work onto a future micro-optics replication foundry at UNC Charlotte. Material properties and component geometries are strongly influenced by the manufacturing process in replication, and this work will provide an analytical tool to connect part inspection to the physics of the replication process.

这项与行业联络的赠款机会（Goari）奖为制定基于对称性的数据分析策略，用于在微观制造中制定成像处理。 根据图像的对称属性将每个图像还原为一小组数字，将使计量学与关键制造变量和组件性能之间存在很强的相关性。 分析策略将基于从测量中去除镜头的预期形状，然后进行对称操作和数据减少方法。 与行业合作，将开发分析工具，并应用于光刻生产的微型折射透镜的干涉测量，除了关键的制造参数（例如照片抗性厚度和蚀刻速率）外，还可以允许零件表征与诸如耦合效率等性能之间的相关性。 相应的测量和分析不确定性也将是研究的关键组成部分。如果成功，该工作将使制造过程的物理与测量相关，从而导致最佳的过程反馈。 这将显着改善微型折射镜头的制造，提高设备的产量，减少测试时间和成本，并最终降低设备成本。 通过将方法纳入商业仪器软件，可以确保制造业社区的广泛传播和接受。通过期刊出版物，会议演讲和行业赞助的技术研讨会来证明生存能力；通过UNC Charlotte的光电和光学通信中心的教育和培训机构开发一个继续教育研讨会和一个高级实验室模块，以通过教育和培训设施为本科和研究生教育；并将作品纳入UNC Charlotte的未来微型访问复制铸造厂。材料特性和组件几何形状受复制的制造过程的强烈影响，这项工作将提供一个分析工具，将零件检查与复制过程的物理学联系起来。