GOALI: A Symmetry-Based Group Theory Approach to Data Reduction for Micro-Optics Manufacturing

GOALI：一种基于对称群论的微光学制造数据缩减方法

• 批准号: 0323505
• 负责人: Angela Davies
• 金额: $ 23.63万
• 依托单位: University of North Carolina at Charlotte
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2003
• 资助国家: 美国
• 起止时间: 2003-09-01 至 2007-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0323505&HistoricalAwards=false
• 关键词: GOALI; Symmetry; Based; Group; Theory

This Grant Opportunity for Academic Liaison with Industry (GOALI) award provides funding for the development of a symmetry-based data analysis strategy for imaging processing in micro-optics manufacturing. Reducing each image to a small set of numbers based on the symmetry properties of the image will enable a strong correlation between the metrology and both the key manufacturing variables and component performance. The analysis strategy will be based on removing the intended shape of the lens from the measurement, followed by symmetry operations and data reduction methods. Working with industry, the analysis tools will be developed and applied to interferometric measurements of micro-refractive lenses that are photolithographically manufactured to allow correlation between part characterization and performance such as coupling efficiency, in addition to key manufacturing parameters such as photo resist thickness and etch rates. A corresponding measurement and analysis uncertainty will also be a critical component of the research.If successful, the work will allow the physics of the manufacturing process to be correlated to the measurement, leading to optimum process feedback. This will significantly improve the manufacturing of micro-refractive lenses, improving device yield, reducing testing time and cost, and ultimately reducing device cost. Broad dissemination and acceptance by the manufacturing community is ensured by ultimately incorporating the methodology into commercial instrumentation software; demonstrating viability through journal publications, conference presentations, and industry-sponsored technical seminars; developing a continuing education workshop and an advanced laboratory module for undergraduate and graduate education through the Education and Training Facility under the Center for Optoelectronics and Optical Communications at UNC Charlotte; and incorporating the work onto a future micro-optics replication foundry at UNC Charlotte. Material properties and component geometries are strongly influenced by the manufacturing process in replication, and this work will provide an analytical tool to connect part inspection to the physics of the replication process.

该学术与工业联络资助机会（GOALI）奖为开发基于对称的数据分析策略，用于微光学制造中的成像处理提供资金。根据图像的对称性，将每个图像减少到一小组数字，将使计量与关键制造变量和组件性能之间具有很强的相关性。分析策略将基于从测量中去除透镜的预期形状，然后是对称操作和数据简化方法。与工业界合作，分析工具将被开发并应用于光刻制造的微折射透镜的干涉测量，以允许零件特性和性能之间的相关性，如耦合效率，以及关键的制造参数，如光刻胶厚度和蚀刻速率。相应的测量和分析不确定度也将是研究的关键组成部分。如果成功，这项工作将允许制造过程的物理与测量相关联，从而导致最佳的过程反馈。这将显著改善微折射透镜的制造，提高器件良率，减少测试时间和成本，最终降低器件成本。通过最终将该方法纳入商业仪器软件，确保了制造业的广泛传播和接受；通过期刊出版物、会议演讲和行业赞助的技术研讨会展示可行性；通过北卡罗来纳大学夏洛特分校光电子和光通信中心的教育和培训设施，为本科和研究生教育开发继续教育讲习班和高级实验室模块；并将这项工作纳入北卡罗来纳大学夏洛特分校未来的微光学复制铸造厂。材料特性和部件几何形状在复制过程中受到制造过程的强烈影响，这项工作将提供一种分析工具，将部件检查与复制过程的物理联系起来。