SGER: Micromachined Floating Element Skin Friction Sensor Technology

项目编号：CTS-0352835主要研究人员：Mark SHEPLAKINSTUTION：FLORIDASGER大学：微机械浮动元件皮肤摩擦传感器技术这是一项探索性研究计划，旨在通过建模、优化和初步制造“概念验证”装置来开发硅微机械浮动元件剪应力传感器。其目的是对一种用于基础流体力学研究的新型测量工具进行初步研究。拟议活动的智力价值将使两个科学界受益。在MEMS领域，这项研究将利用创新的制造技术和多学科优化来实现研究仪器级的壁面剪应力传感器。具体地说，将开发一种新型的横向离子注入压阻式浮动元件传感器，该传感器采用集成电路兼容的制造工艺，产生具有电子穿透晶片背面合同的器件。这种微制造的贡献将产生真正的平装式直接壁面剪应力传感器，其电引线和线键隐藏在流场之外，从而为气体或液体应用提供了坚固的传感器，从而导致可以忽略不计的流动干扰。在流体力学领域，这种传感器的实现将极大地扩展表面摩擦力测量技术的空间和时间分辨率以及测量精度。一旦开发出来，这项技术将被用来帮助阐明空气和水设施中具有可变压力梯度的二维和三维湍流边界层的基本物理。这些活动将广泛影响测量技术。该传感器的成功实现将为湍流研究社区、航空航天工业和生物医学研究社区提供关键的测量能力。

ABSTRACTPROPOSAL NO.: CTS-0352835PRINCIPAL INVESTIGATORS: MARK SHEPLAKINSTITUTION: UNIVERSITY OF FLORIDASGER: MICROMACHINED FLOATING ELEMENT SKIN FRICTION SENSOR TECHNOLOGYThis is an exploratory research program for the development of silicon-micromachined floating-element shear-stress sensors via modeling, optimization and preliminary fabrication of a "proof of concept" device. The goal is to perform preliminary research on a novel measurement tool for fundamental fluid mechanics research. The intellectual merit of the proposed activities will benefit two scientific communities. In the MEMS community, the research will utilize innovative fabrication techniques and multidisciplinary optimization to realize a research instrumentation-grade wall-shear stress sensor. Specifically, a novel, lateral ion-implanted, piezoresistive floating element sensor using an integrated-circuit compatible manufacturing process yielding a device possessing electronic through-wafer backside contracts will be developed. This microfabrication contribution will result in a truly flush-mounted, direct wall shear stress sensor, with the electrical leads and wire bonds hidden from the flow field resulting in a robust sensor for gas or liquid applications that induces negligible flow disturbances. In the fluid mechanics community, the realization of this sensor will greatly extend the spatial and temporal resolution capabilities as well as the accuracy of skin friction measurement technology. Once developed, this technology will be employed to help elucidate the fundamental physics of both two- and three-dimensional turbulent boundary layers possessing variable pressure gradients in both air and water facilities. These activities will broadly impact measurement technology. Successful realization of the sensor will provide a critical measurement capability for the turbulence research community, the aerospace industry, and biomedical research community.