NER: A Process for Plasma Co-Deposition of Nanoparticles for Mixed-Phase Thin Films

NER：混合相薄膜纳米颗粒的等离子体共沉积工艺

• 批准号: 0403887
• 负责人: James Kakalios
• 金额: --
• 依托单位: University of Minnesota-Twin Cities
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-07-15 至 2006-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0403887&HistoricalAwards=false
• 关键词: NER; Process; Plasma; Co; Deposition

The objective of this research is the synthesis and characterization ofnovel mixed-phase materials consisting of semiconductor nanocrystallitesembedded within a thin film semiconductor or insulator. The approach isto use a new co-deposition system to create nanoparticles in a plasmachamber that are rapidly injected into a second plasma deposition systemwhere they are incorporated into a growing thin film material.Separating the particle growth from the thin film deposition enables theparticle beam density, particle size, and the film deposition rate to beindependently controlled. Cross-sectional Transmission ElectronMicroscopy measurements will provide important information on the sizeand density of the nanocrystalline inclusions. The bulk properties ofthe resulting films will be characterized through measurements of theconductance; optical absorption spectrum and the infra-red absorptionspectrum providing important information concerning the defect densityand hydrogen microstructure.This basic research into the fabrication of novel materials hasconsiderable potential for the development of a wide variety of devicesincorporating nanoscale inclusions and for the modification of opticalproperties of dielectric or polymer films. Possible practicalapplications include improved solar cells, non-volatile memories andsolid-state lighting. Successful completion of this project may lead torapid commercialization of new manufacturing processes throughcollaboration with a private company vested in solid-state lighting,that has the potential to replace less efficient fluorescent andincandescent lamps.

本研究的目的是合成和表征由半导体纳米晶嵌入薄膜半导体或绝缘体组成的新型混合相材料。 该方法是使用一种新的共沉积系统在等离子体室中产生纳米颗粒，这些纳米颗粒被快速注入第二个等离子体沉积系统，在那里它们被结合到生长的薄膜材料中。将颗粒生长与薄膜沉积分离使得粒子束密度、颗粒尺寸和薄膜沉积速率能够独立控制。 横截面透射电子显微镜测量将提供有关纳米晶夹杂物的尺寸和密度的重要信息。 所得薄膜的体性质将通过测量电导来表征;光学吸收光谱和红外光谱红色吸收光谱提供了有关缺陷密度和氢微观结构的重要信息。这种新型材料制造的基础研究对于开发各种各样的包含纳米级夹杂物的器件以及改进电介质或聚合物的光学性能具有相当大的潜力薄膜. 可能的实际应用包括改进的太阳能电池、非易失性存储器和固态照明。该项目的成功完成可能会导致新的制造工艺的快速商业化，通过与一家私营公司合作，在固态照明，有可能取代效率较低的荧光灯和白炽灯。