NER: Fabricating Heterogeneous Nanorods by Physical Vapor Deposition

NER：通过物理气相沉积制造异质纳米棒

• 批准号: 0404066
• 负责人: Yiping Zhao
• 金额: --
• 依托单位: University of Georgia Research Foundation Inc
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-07-01 至 2007-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0404066&HistoricalAwards=false
• 关键词: NER; Fabricating; Heterogeneous; Nanorods; Physical

The objective of this project is to develop a simple and generic method to fabricate three-dimensional heterogeneous nanorod (10 - 100 nm in diameter) structures by multilayer glancing angle deposition. This method is a low temperature multilayer physical vapor deposition process, and can form heterogeneous nanorods from a large variety of materials, including metals, semiconductors, insulators, composites, and ceramics. In this project, two different kinds of structures will be demonstrated: metal A/metal B and superconductor/insulator nanorod structures. The growth mechanism of nanorod formation, and how different growth conditions affect the size, shape, and the uniformity of nanorods, will be investigated. The quality of the nanorod array will also be controlled by two dimensional regular template arrays using either colloid monolayer or electron beam lithographic methods. The proposed method, if successful, will open a door for the researchers to access and design different novel multilayered nanostructures by simply changing the evaporation materials, and will catalyze rapid and innovative advances not only in fabricating novel nanoelectronics devices, but also in designing novel functionalized materials. Those novel devices could be used to make faster computers, higher density storage medium, more reliable and higher sensitivity chemical biological sensors, etc. The novel functionalized multilayer materials can be used for targeted drug delivery and tumor therapy, energy conservation coating, etc. These applications will help to restore a strong economy, improve public healthcare, and fight terrorists with better weapons, which are current concerns of every American.

本计画的目的是发展一种简单且通用的方法，借由多层掠射角沉积来制造三维异质奈米棒（直径10 - 100奈米）结构。该方法是一种低温多层物理气相沉积工艺，并且可以从多种材料形成异质纳米棒，包括金属、半导体、绝缘体、复合材料和陶瓷。在这个项目中，将展示两种不同的结构：金属A/金属B和超导体/绝缘体纳米棒结构。纳米棒形成的生长机制，以及不同的生长条件如何影响纳米棒的尺寸，形状和均匀性，将被研究。纳米棒阵列的质量也将通过使用胶体单层或电子束光刻方法的二维规则模板阵列来控制。该方法如果成功，将为研究人员打开一扇大门，通过简单地改变蒸发材料来访问和设计不同的新型多层纳米结构，并将不仅在制造新型纳米电子器件方面，而且在设计新型功能化材料方面催化快速和创新的进步。这些新型器件可用于制造更快的计算机、更高密度的存储介质、更可靠和更高灵敏度的化学生物传感器等。新型功能化多层材料可用于靶向药物输送和肿瘤治疗、节能涂层等。这些应用将有助于恢复强劲的经济、改善公共医疗保健、用更好的武器打击恐怖分子，这是每个美国人当前关心的问题。