Sensors: Integrated Piezoresistive Sensing for Compliant Microdevices

传感器：用于兼容微型设备的集成压阻传感

• 批准号: 0428532
• 负责人: Timothy McLain
• 金额: $ 27万
• 依托单位: Brigham Young University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2004
• 资助国家: 美国
• 起止时间: 2004-08-01 至 2007-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0428532&HistoricalAwards=false
• 关键词: Sensors; Integrated; Piezoresistive; Sensing; Compliant

Abstract0428532PI: Timothy W. McLain Brigham Young UniversityThe integration of sensing capabilities into microdevices is a significant challenge because the sensors used are often larger than the devices they monitor. Compliant micromechanisms may provide a means of overcoming the difficulty associated with sensor integration in a variety of applications. Compliant microdevices use the deflection of flexible members to obtain their motion, which results in desirable characteristics at the micro level. These characteristics include manufacturability using existing methods, high-precision motion, and high reliability. A significant advantage of compliant mechanisms that has yet to be fully exploited is that they have physical properties that change as the device moves. Since their motion comes from strain in the compliant elements, any strain-sensitive properties of the material (such as electrical resistivity) will change as the device moves. This intrinsic sensing capability of compliant devices is an asset that this project intends to utilize in the control and function of micro devices. The concept of sensors intrinsic to compliant mechanisms is powerful and enabling for microelectromechanical systems (MEMS). Numerous applications could benefit from the functionality provided by this sensing concept including: micro-sized nanopositioners, non-contact force threshold detectors, force transducers for microdevices, reliable bistable microswitches, and nonvolatile noncontact mechanical memory.This is a project supported under Sensors Initiative NSF 04-522.

【摘要】杨百翰大学摘要：将传感能力集成到微设备中是一项重大挑战，因为所使用的传感器通常比它们监测的设备大。兼容的微机制可以提供一种克服各种应用中与传感器集成相关的困难的方法。柔性微器件利用柔性构件的挠度来获得其运动，从而在微观层面上获得理想的特性。这些特性包括使用现有方法的可制造性，高精度运动和高可靠性。兼容机制尚未被充分利用的一个重要优势是，它们具有随设备移动而变化的物理特性。由于它们的运动来自于柔性元件的应变，因此材料的任何应变敏感特性（如电阻率）都会随着设备的移动而改变。兼容设备的这种固有传感能力是本项目打算在微设备的控制和功能中利用的资产。柔性机构固有的传感器概念对微机电系统（MEMS）来说是强大的和可行的。许多应用可以从这种传感概念提供的功能中受益，包括：微型纳米器件、非接触式力阈值检测器、用于微型器件的力传感器、可靠的双稳态微开关和非易失性非接触式机械存储器。这是一个由传感器倡议NSF 04-522支持的项目。