Collaborative Research: New Directions for Advanced VLSI Manufacturability

提案ID：0429737PI/COPI：Gabriel Robins(UVA)，Andrew Kahng(UCSD)，Aleksandr Zelikovski(GA州)标题：协作研究：先进VLSI可制造性的新方向摘要：随着VLSI技术进入不断缩小的设计体制和不断增长的复杂性，保持足够的验证、工艺窗口和制造产量变得越来越困难。该项目将研究版图设计和可制造性之间的几个新的关键问题，包括用于相移掩模的自动布局流程，用于提高成品率的面积填充合成，用于漏电可变性控制的栅长偏置，以及用于探索受限设计规则的原则性方法。我们提议的研究的智力价值来自于它对未来集成的设计到制造流程的广泛概念化，以及它对几个关键设计技术目标的选择性关注。这项工作将有助于缓解目前威胁摩尔定律和半导体技术路线图的一些挑战。

Proposal ID: 0429737PI/coPI: Gabriel Robins (UVA), Andrew Kahng (UCSD), Aleksandr Zelikovskiy (GA state)Title: Collaborative Research: New Directions for Advanced VLSI Manufacturability Abstract:As VLSI technology advances into ever shrinking design regimes and growing complexity, it is increasingly difficult to maintain adequate verification, process windows, and manufacturing yields. This project will investigate several newly critical issues at the interface between layout design and manufacturability, including automaticlayout flows for phase-shifting masks, area fill synthesis for yield improvement, gate-length biasing for leakage variability control, and principled methodologies for exploring restricted design rules. The Intellectual merit of our proposed research stems from its broad conceptualization of a future integrated design-to-manufacturing flow, coupled with its selective focus on several key design technology goals. This work will help alleviate some of the challenges that now threaten Moore's Law and the Semiconductor Technology Roadmap.