Joint Research Between VLSI CAD and MEMS Areas: The Fifth Physical Design Workshop; April 15-17, 1996; Reston, Virginia

VLSI CAD与MEMS领域联合研究：第五届物理设计研讨会；

• 批准号: 9531666
• 负责人: Gabriel Robins
• 金额: $ 1.25万
• 依托单位: University of Virginia Main Campus
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 1996
• 资助国家: 美国
• 起止时间: 1996-03-01 至 1997-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=9531666&HistoricalAwards=false
• 关键词: Joint; Research; Between; VLSI; CAD

The Micro-Electro-Mechanical Systems (MEMS) process technology has matured to the point where it is possible to fabricate a chip with both electrical and mechanical pomponents on it. However, tools and design methodologies are lacking. This worksho is to bring together design researchers from the VLSI CAD and MEMS design fields to discuss and develop ideas for a new design methodology for combined MEMS/VLSI structures.

微机电系统（MEMS）工艺技术已经成熟到可以制造具有电气和机械部件的芯片的程度。 然而，缺乏工具和设计方法。 本工作坊将汇集来自超大规模集成电路CAD和MEMS设计领域的设计研究人员，讨论和发展MEMS/VLSI组合结构的新设计方法。