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Joint Research Between VLSI CAD and MEMS Areas: The Fifth Physical Design Workshop; April 15-17, 1996; Reston, Virginia

Joint Research Between VLSI CAD and MEMS Areas: The Fifth Physical Design Workshop; April 15-17, 1996; Reston, Virginia
VLSI CAD与MEMS领域联合研究:第五届物理设计研讨会;
批准号:
9531666
负责人:
Gabriel Robins
金额:
$1.25万
依托单位国家:
美国
项目类别:
Standard Grant
财政年份:
1996
资助国家:
美国
项目状态:
已结题
起止时间:
1996-03-01 至 1997-02-28

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中文摘要
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英文摘要
The Micro-Electro-Mechanical Systems (MEMS) process technology has matured to the point where it is possible to fabricate a chip with both electrical and mechanical pomponents on it. However, tools and design methodologies are lacking. This worksho is to bring together design researchers from the VLSI CAD and MEMS design fields to discuss and develop ideas for a new design methodology for combined MEMS/VLSI structures.
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