Development of a Virtual Reactor for Experiential Learning of Design of Experiments

开发用于实验设计体验式学习的虚拟反应器

• 批准号: 0442832
• 负责人: Milo Koretsky
• 金额: --
• 依托单位: Oregon State University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-06-01 至 2007-05-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0442832&HistoricalAwards=false
• 关键词: Development; Virtual; Reactor; Experiential; Learning

Presently there is a need for more effective ways to integrate statistical methodologies such as Design of Experiments (DOE) into the engineering curriculum. We are using a fundamentals-based numerical simulation of chemical vapor deposition (CVD) to develop a virtual reactor where students will learn and then actually apply DOE. Associated educational materials are also being developed. The simulation of the virtual reactor is based on fundamental principles of mass transfer and chemical reaction, obscured by added "noise." However, rather than having access to the entire output of model, the film thicknesses are given to students only at the select points within the wafer and from wafer to wafer that they have decided to "measure." Student assessment will be based not only on the ultimate reactor performance but also on the cost of experimentation. The virtual reactor allows students a broader and more realistic experience in using the DOE methodology for process improvement - as if they were operating an actual industrial reactor. The Northwest Regional Educational Laboratory is leading the project evaluation while a five-member advisory committee consists of engineers and statisticians from academia (OSU, University of Oregon) and industry (LSI Logic, Intel, WaferTech).

目前，需要更有效的方法来整合统计方法，如实验设计（DOE）到工程课程。我们正在使用基于基础的化学气相沉积（CVD）数值模拟来开发一个虚拟反应器，学生将在其中学习并实际应用DOE。 相关的教育材料也在编制之中。虚拟反应器的模拟是基于传质和化学反应的基本原理，被添加的“噪音”所掩盖。然而，学生们并没有获得模型的全部输出，他们只在晶片内的选定点上以及在他们决定“测量“的晶片之间给出了薄膜厚度。“学生的评估将不仅基于最终的反应堆性能，而且还基于实验成本。虚拟反应器让学生在使用DOE方法进行过程改进时获得更广泛和更真实的体验-就像他们正在操作实际的工业反应器一样。 西北地区教育实验室正在领导项目评估，而一个由五名成员组成的咨询委员会由来自学术界（俄勒冈州立大学，俄勒冈州大学）和工业界（LSI逻辑，英特尔，WaferTech）的工程师和统计学家组成。