Development of a Virtual Reactor for Experiential Learning of Design of Experiments

目前，需要更有效的方法将统计方法，如实验设计(DOE)纳入工程课程。我们正在使用基于基础的化学气相沉积(CVD)数值模拟来开发一个虚拟反应堆，学生将在其中学习并实际应用DOE。相关的教育材料也在开发中。虚拟反应堆的模拟是基于传质和化学反应的基本原理，被附加的“噪音”所掩盖。然而，不是可以访问整个模型的输出，而是只向学生提供晶片内和晶片之间的选定点处的薄膜厚度，这些晶片之间的厚度是他们决定“测量”的。学生的评估将不仅基于最终的反应堆性能，还将基于实验成本。虚拟反应堆让学生在使用能源部方法进行工艺改进方面有了更广泛、更现实的体验--就像他们正在操作一个实际的工业反应堆一样。西北地区教育实验室领导项目评估，一个由五人组成的咨询委员会由来自学术界(俄勒冈大学)和产业界(LSI Logic、Intel、WaferTech)的工程师和统计学家组成。

Presently there is a need for more effective ways to integrate statistical methodologies such as Design of Experiments (DOE) into the engineering curriculum. We are using a fundamentals-based numerical simulation of chemical vapor deposition (CVD) to develop a virtual reactor where students will learn and then actually apply DOE. Associated educational materials are also being developed. The simulation of the virtual reactor is based on fundamental principles of mass transfer and chemical reaction, obscured by added "noise." However, rather than having access to the entire output of model, the film thicknesses are given to students only at the select points within the wafer and from wafer to wafer that they have decided to "measure." Student assessment will be based not only on the ultimate reactor performance but also on the cost of experimentation. The virtual reactor allows students a broader and more realistic experience in using the DOE methodology for process improvement - as if they were operating an actual industrial reactor. The Northwest Regional Educational Laboratory is leading the project evaluation while a five-member advisory committee consists of engineers and statisticians from academia (OSU, University of Oregon) and industry (LSI Logic, Intel, WaferTech).