CAREER: Rapid Lateral Solidification in Thin Metallic Films: A New Route to Engineered Microstructures for Advanced Micro-Device Applications

职业：金属薄膜中的快速横向凝固：先进微器件应用工程微结构的新途径

• 批准号: 0448213
• 负责人: John Leonard
• 金额: --
• 依托单位: University of Pittsburgh
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2005
• 资助国家: 美国
• 起止时间: 2005-07-01 至 2010-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0448213&HistoricalAwards=false
• 关键词: CAREER; Rapid; Lateral; Solidification; Thin

Rapid lateral solidification (RLS) is a unique new laser-melting process that allows thin metallic films on dielectric/amorphous substrates to be rapidly solidified. It can be viewed as 'nonconventional' or 'integrated' rapid solidification that can provide rapidly solidified films of extremely high purity and uniformity. This grant aims to perfect and use this technique for a detailed study of three technically promising Cu-based systems, and to leverage related numerical modeling efforts into a comprehensive computer modeling initiative in Materials Science and Engineering at the University of Pittsburgh. The experimental effort: (1) investigates the rapid solidification process in-situ using laser melting and RLS of Cu, Cu-Cr and Cu-Sn thin films under well-controlled conditions (this includes in-situ measurements of solidification velocities, and analysis via transmission and scanning microscopy); (2)? extends metal rapid solidification research farther into non-equilibrium regimes, exploring the boundaries of amorphous and glass formation in Cu-Sn alloys; (3) measures application-critical properties on RLS microstructures of Cu and Cu-Cr alloys, including conductivity and electromigration; (4) models the experiments using the numerical simulation code 3DNS, which will be integrated with a new computer modeling education initiative in MSE. The research will open up a broad new arena for applications of non-equilibrium metallic phases, engineered and composite microstructures, shape memory functionality, and amorphous metals into thin-film advanced devices, including engineered microstructures for Cu and Cu-alloy interconnects, shape memory and metallic glass alloys integrated into sensors, MEMS, and SAW devices, and new metal-based connections/electrodes with advanced metal-oxide devices. A new comprehensive computer modeling initiative is planned that will integrate instruction, support, and outreach to transform the MSE curriculum at the University of Pittsburgh. Another goal recruits graduate students, boosts undergraduate enrollment, as well as increases diversity through student exchanges with the University of Augsburg exchange program and the Research Experience for Teachers (RET) program.

快速侧向固化（RLS）是一种独特的新的激光熔化工艺，可以使薄金属薄膜在介电/非晶衬底上快速固化。它可以被视为“非常规”或“集成”快速固化，可以提供极高纯度和均匀性的快速固化膜。这项资助旨在完善和使用这种技术，对三种技术上有前途的铜基系统进行详细研究，并利用相关的数值建模工作，在匹兹堡大学的材料科学与工程中进行全面的计算机建模。实验工作：（1）在良好控制的条件下，使用激光熔化和RLS研究Cu、Cu-Cr和Cu-Sn薄膜的原位快速凝固过程（这包括凝固速度的原位测量以及通过透射和扫描显微镜的分析）;（2）？该研究将金属快速凝固研究进一步扩展到非平衡状态，探索了Cu-Sn合金中非晶和玻璃形成的边界;（3）测量了Cu和Cu-Cr合金RLS微观结构的应用关键特性，包括电导率和电迁移;（4）使用数值模拟代码3DNS模拟实验，该代码将与MSE新的计算机模拟教育计划相结合。该研究将为非平衡金属相、工程和复合微结构、形状记忆功能和非晶态金属在薄膜先进器件中的应用开辟广阔的新竞技场，包括用于Cu和Cu合金互连的工程微结构、集成到传感器、MEMS和SAW器件中的形状记忆和金属玻璃合金，以及具有先进金属氧化物器件的新型金属基连接/电极。一个新的全面的计算机建模计划，将整合教学，支持和推广，以改变在匹兹堡大学的MSE课程。另一个目标是招收研究生，提高本科生入学率，并通过与奥格斯堡大学交换计划和教师研究经验（RET）计划的学生交流来增加多样性。