RUI: Fundamental Studies of a-Ge:H and a-SiGe:H Deposition by Reactive Magnetron Sputtering
RUI:反应磁控溅射 a-Ge:H 和 a-SiGe:H 沉积的基础研究
基本信息
- 批准号:0513775
- 负责人:
- 金额:$ 21.63万
- 依托单位:
- 依托单位国家:美国
- 项目类别:Continuing Grant
- 财政年份:2005
- 资助国家:美国
- 起止时间:2005-06-01 至 2009-08-31
- 项目状态:已结题
- 来源:
- 关键词:
项目摘要
TECHNICAL EXPLANATION: This project aims for greater understanding of the deposition of hydrogenated amorphous germanium (a-Ge:H) and hydrogenated amorphous silicon-germanium (a-SiGe:H) by direct current reactive magnetron sputtering-materials with relevance to photovoltaic applications. The approach focuses on the role of energy and momentum flux into the surface during growth in determining film properties, and the elucidation of the mechanism of hydrogen incorporation in the film. The plasma density will be systematically varied using an unbalanced magnetron and an external magnetic field; a radio frequency bias will be used to control the ion energy. Plasma characteristics will be determined using plasma probes. Monte Carlo simulations of sputter atom transport will be utilized to determine the energy, flux, and angular distribution of energetic neutral bombardment, to be verified by experimental studies of deposition profiles. Hydrogen incorporation kinetics will be studied by mass spectrometry and optical emission spectroscopy. These data will be correlated with compositional, structural, optical, and electrical properties of the resulting films as determined by optical transmission and reflection spectroscopy, infrared absorption spectroscopy, Rutherford Back Scattering, Elastic Recoil Detection, photo and dark conductivity, and subgap absorption spectroscopy. This information will provide a sound basis for understanding the causes of the inferior properties of these materials compared to hydrogenated amorphous silicon, and should lead to further optimization of these technologically important materials. This study is expected to make an important contribution to basic understanding of thin film growth by sputter deposition.. NON-TECHNICAL EXPLANATIONThe project addresses fundamental materials research with strong technological relevance to electronics and photonics, and effectively integrates research and education. The research will be carried out in collaboration with undergraduate research assistants at Macalester College, a four-year liberal arts college. The project will provide valuable research training for students by providing unique research opportunities, by providing options for academic year independent research projects, and by enhancing courses related to materials science in the physics curriculum. It will also serve as a model for materials research at an undergraduate institution, and as a model for the integration of research and teaching in a liberal arts college physics department.
技术说明:本项目旨在更好地了解与光伏应用相关的直流反应磁控溅射材料沉积氢化非晶锗(a-Ge:H)和氢化非晶硅锗(a-SiGe:H)。该方法的重点是在生长过程中进入表面的能量和动量通量在决定膜性质中的作用,以及氢在膜中的结合机制的阐明。利用不平衡磁控管和外加磁场系统地改变等离子体密度;将使用射频偏压来控制离子能量。等离子体特性将用等离子体探针测定。溅射原子输运的蒙特卡罗模拟将用于确定高能中性轰击的能量、通量和角分布,并通过沉积剖面的实验研究加以验证。氢的结合动力学将通过质谱和发射光谱进行研究。这些数据将通过光学传输和反射光谱、红外吸收光谱、卢瑟福后向散射、弹性后坐力探测、光和暗电导率以及亚间隙吸收光谱测定,与所得薄膜的成分、结构、光学和电性能相关联。这些信息将为理解这些材料与氢化非晶硅相比性能较差的原因提供坚实的基础,并应导致这些技术重要材料的进一步优化。本研究可望对溅射沉积生长薄膜的基本认识作出重要贡献。本项目主要从事与电子、光子学相关的基础材料研究,有效地将科研与教育结合起来。这项研究将与四年制文理学院马卡莱斯特学院(Macalester College)的本科生研究助理合作进行。该项目将通过提供独特的研究机会,提供学年独立研究项目的选择,以及加强物理课程中与材料科学相关的课程,为学生提供有价值的研究训练。它还将成为本科院校材料研究的典范,以及文理学院物理系研究与教学结合的典范。
项目成果
期刊论文数量(0)
专著数量(0)
科研奖励数量(0)
会议论文数量(0)
专利数量(0)
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James Doyle其他文献
Student-directed interactive animation for learning cytochrome P450-mediated drug metabolism.
学生指导的交互式动画,用于学习细胞色素 P450 介导的药物代谢。
- DOI:
10.1016/j.cptl.2018.08.021 - 发表时间:
2018 - 期刊:
- 影响因子:1.2
- 作者:
James Doyle;K. Glass;Michael Racz;Judy Teng - 通讯作者:
Judy Teng
The interspinous device ‘Spinos’: A case series
- DOI:
10.1016/j.ijsu.2012.06.307 - 发表时间:
2012-01-01 - 期刊:
- 影响因子:
- 作者:
Sophy Rymaruk;Arif Razak;James Doyle - 通讯作者:
James Doyle
‘Spurious egocentricity’ and the first person
- DOI:
10.1007/s11229-015-0948-1 - 发表时间:
2015-10-30 - 期刊:
- 影响因子:1.300
- 作者:
James Doyle - 通讯作者:
James Doyle
Changing the Face of Police Lineups: Delivering More Information From Witnesses
改变警察队伍的面貌:从目击者那里提供更多信息
- DOI:
- 发表时间:
2021 - 期刊:
- 影响因子:0
- 作者:
N. Brewer;James Doyle - 通讯作者:
James Doyle
창조도시(Creative City) 외
- DOI:
10.4324/9781315615097 - 发表时间:
2008-08 - 期刊:
- 影响因子:0
- 作者:
James Doyle - 通讯作者:
James Doyle
James Doyle的其他文献
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{{ truncateString('James Doyle', 18)}}的其他基金
Collaborative Research: Three-Dimensional Flow-Structure Interaction During Phonation
合作研究:发声过程中的三维流-结构相互作用
- 批准号:
1067286 - 财政年份:2011
- 资助金额:
$ 21.63万 - 项目类别:
Standard Grant
RUI: Fundamental Studies of Zinc Oxide Deposition by Reactive Magnetron Sputtering
RUI:反应磁控溅射氧化锌沉积的基础研究
- 批准号:
9973934 - 财政年份:1999
- 资助金额:
$ 21.63万 - 项目类别:
Continuing Grant
Semiconductor Characterization in Undergraduate Physics
本科物理中的半导体表征
- 批准号:
9352385 - 财政年份:1993
- 资助金额:
$ 21.63万 - 项目类别:
Standard Grant
Morphology and Evolution of Early Cretaceous Angiosperm Pollen
早白垩世被子植物花粉的形态与演化
- 批准号:
8415772 - 财政年份:1985
- 资助金额:
$ 21.63万 - 项目类别:
Standard Grant
Development of a New Experimental Method For the Stress Analysis of Transient Thermoelastic Problems in AxisymmetricBodies (Mechanical Engineering and Applied Mechanics)
开发轴对称体瞬态热弹性问题应力分析的新实验方法(机械工程和应用力学)
- 批准号:
8206736 - 财政年份:1982
- 资助金额:
$ 21.63万 - 项目类别:
Standard Grant
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