SIRG/Collaborative Research: Distributed Subwavelength Micro Photonic Sensors for In-situ Monitoring with High Spatial and Temporal Resolution in Manufacturing Environments

传感器和传感器网络的目标（NSF 05-526），传感器跨学科研究小组（SIRG）项目是通过研究这些传感器的空间和时间分辨率的基本限制，开发创新的嵌入技术，以及在真实的制造过程中测试传感器。具体来说，该研究小组将研究用于温度和应变测量的集成微光子传感器的空间和时间分辨率的基本限制。微光子传感器将嵌入金属中，以确保传感器在制造环境中的生存性和可靠性。一种创新的批量制造金属嵌入式亚波长微光子传感器将被开发。技术将被研究和优化用于将金属嵌入式微光子传感器转移到制造环境中的较大金属结构中。该研究小组还寻求在真实的制造测试平台中实现这些传感器，并利用传感数据来更好地了解两个重要过程，半导体制造的化学机械平面化和钢铁生产的连续铸造。如果成功，这项研究将通过亚波长光子传感器，金属嵌入传感器，以及在真实的制造过程中进行感测。新颖的亚波长微光子传感器沿着与创新的嵌入技术将产生高空间分辨率，高灵敏度和快速的时间响应的测量。该项目的成功可以大大推进化学机械平面化和连续铸造钢工艺的基础知识。微光子传感器阵列的成功实施可以推进对许多其他制造工艺的基本理解，从而显著提高生产率并节省大量成本。除了计划的出版物、工业短期课程和专利外，工业试验台将促进立即向工业转让技术。本科生和研究生将能够获得亚波长微光子技术的实践经验。将举办暑期工作坊，并为K12学生和教师开发合适的科学模块。PI还将吸引，留住和吸引来自代表性不足群体的学生。

The objective of this Sensors and Sensor Networks (NSF 05-526), Sensors Interdisciplinary Research Group (SIRG) project is to conduct fundamental investigations towards the implementation of novel subwavelength microphotonic sensors for applications in manufacturing environments by studying the fundamental limits in the spatial and temporal resolutions of these sensors, developing innovative embedding techniques, and testing sensors in real manufacturing processes. Specifically, the research group will study the fundamental limit in the spatial and temporal resolution of integrated microphotonic sensors for temperature and strain measurements. Microphotonic sensors will be embedded into metals to ensure sensor survivability and reliability in manufacturing environments. An innovative batch fabrication of metal embedded subwavelength microphotonic sensors will be developed. Techniques will be studied and optimized for transferring metal embedded microphotonic sensors into larger metallic structures in manufacturing environments. The research group also seeks to implement these sensors in real manufacturing testbeds and utilize sensing data to achieve a better fundamental understanding of two important processes, chemical mechanical planarization for semiconductor manufacturing and continuous casting for steel production.If successful, this research will significantly advance sensor technologies through an interdisciplinary study of subwavelength photonic sensors, sensor embedding into metals, and sensing in real manufacturing processes. Novel sub-wavelength microphotonic sensors along with innovative embedding techniques will yield measurements with high spatial resolution, high sensitivity, and fast temporal response. The success of this project can significantly advance fundamental knowledge for chemical mechanical planarization and continuous casting of steel processes. The successful implementation of microphotonic sensor arrays could advance the fundamental understanding of numerous other manufacturing processes, thus significantly improving productivity and generating significant cost savings. Industrial testbeds will facilitate immediate technology transfer to industry, in addition to planned publications, short courses to industry, and patents. Undergraduate and graduate students will be able to get hands-on experience in subwavelength microphotonic technology. Summer workshops will be held and suitable science modules will be developed for K12 students and teachers. The PIs will also attract, retain, and engage students from under-represented groups.