Fabrication of Sub-Micron-Scale Electronic and Photonic Structures Using Direct Photo-Patterning Techniques

利用直接光图像化技术制造亚微米尺度的电子和光子结构本研究的目的是基于直接光图像化技术直接制造亚微米尺度的电子和光子器件结构。该方法涉及使用直接光学诱导在偶氮苯取代聚合物上制造表面浮雕结构。这种方法可以有效地与独特的后处理技术相结合，以可靠地获得无机氧化物和柔性聚合物薄膜的图像化微/纳米结构，用于制造光学和光电器件。智力优势：这一举措将有助于大大扩展最先进的技术，使无机材料的大面积微/纳米图案阵列和大面积聚合物衬底的图案易于制造。在这项工作中开发的知识库也适用于其他新兴的纳米级技术，包括发光二极管，太阳能电池，紫外激光器，液晶显示器和集成光学和传感器阵列的分布式反馈光栅。更广泛的影响：所建议的工作的另一个非常重要的影响涉及到对这种新颖的模式技术的研究生的培训。受过技术培训的创新人员将有助于培育新技术，催生新业务，并为美国公司在全球竞争时代提供竞争优势。这项活动还将通过在大学开展的拓展项目，为本科生和高中生提供相当大的刺激，让他们继续学习，并最终从事科学和工程方面的职业。

Fabrication of Submicron-Scale Electronic and Photonic Structures Using Direct Photo-Patterning TechniquesThe objective of this research is the direct fabrication of sub-micron scale electronic and photonic device structures based on direct photo patterning. The approach involves the use of direct optically induced fabrication of surface relief structures on azobenzene substituted polymers. This approach can be effectively combined with unique post-processing techniques to reliably obtain patterned micro/nanostructures of both inorganic oxides, and flexible polymer films for fabricating optical and opto-electronic devices. Intellectual merit: This initiative will help in significantly extending the state-of-the-art to the facile fabrication of large-area micro/nano-patterned arrays of both inorganic materials and patterning of large area polymeric substrates. The knowledge base developed in this work is also applicable to other emerging nanoscale technologies including light emitting diodes, solar cells, ultraviolet laser, liquid crystal displays and distributed feedback grating for integrated optics and sensor arrays. Broader Impact: An additional very important impact of the proposed work involves the training of the involved graduate students in this novel patterning technique. Innovative technically trained personnel shall help foster new technologies that can spawn new businesses and provide U.S. companies the competitive edge in an era of global competition. This activity will also provide considerable stimulus to undergraduate and high school students, through the outreach programs in place at the university to pursue studies and ultimately embark on careers in science and engineering.