Feasibility of a Novel Three-Dimensional Nano-Manufacturing Technique: Nanomilling

新型三维纳米制造技术的可行性：纳米铣削

• 批准号: 0602401
• 负责人: Burak Ozdoganlar
• 金额: $ 7.26万
• 依托单位: Carnegie-Mellon University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2006
• 资助国家: 美国
• 起止时间: 2006-09-01 至 2008-08-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0602401&HistoricalAwards=false
• 关键词: Feasibility; Novel; Three; Dimensional; Nano

12-13-07This Small Grant for Exploratory Research (SGER) award supports the development of a novel nanomanufacturing technique, nanomilling, for creating three-dimensional shapes at the nano scale. The specific objectives of the project are (1) to develop the nanomilling technique and associated testbed, and (2) to assess the size, shape, and material capability of the technique by conducting experiments under varying operational conditions. The nanomilling technique is mechanical in nature, where the shape generation will be achieved by removing unwanted material. Nanomilling equipment will be designed and constructed, and nano-scale atomic force microscope probe tips will be used as tooling. The tip motion will be controlled with high precision to selectively remove the workpiece material to create various convex and concave shapes, such as slots, walls, and pockets. The educational objectives include involving graduate and undergraduate students in nanomanufacturing research and transferring the research findings to classroom by incorporating them into the PI?s new course titled ?micro/nano-manufacturing.? The existing infrastructure of Carnegie Mellon University and Pittsburgh public schools will be utilized to attract high-school students and teachers to nanomanufacturing research. If successful, the research will advance the field of nanotechnology by expanding current capabilities of nano-scale shape generation. The technique has po­tential to overcome current limitations, and dramatically advancing current nanomanufacturing capa­bility. Benefits of the nanomilling technique will include capability of creating arbitrary three-dimensional shapes, application to a diverse selection of materials, simplicity in design to nanomanufacturing, and capacity to be integrated into existing micro and nanomanufacturing techniques. Integration of the nanomilling process with other nanomanufacturing processes may also make it possible to find the best trade-off between the throughput and geometric capability. Furthermore, its low cost and simplicity will allow volumetric scale-up via parallel operation. The project will also contribute to the understanding of material characteristics and mechanics behavior at the nano scale. The developed technique will have an important impact on emerging fields of nano-fluidics, nano-electronics, nano-medicine, nano-electromechanical systems, and nano-robotics, thereby positively impacting the competitiveness of the U.S. in nanomanufacturing.

12-13-07这项探索性研究小额资助 (SGER) 奖项支持开发一种新型纳米制造技术——纳米铣削，用于在纳米尺度上创建三维形状。该项目的具体目标是（1）开发纳米铣削技术和相关测试台，（2）通过在不同的操作条件下进行实验来评估该技术的尺寸、形状和材料性能。纳米铣削技术本质上是机械技术，通过去除不需要的材料来实现形状生成。将设计和建造纳米铣削设备，并使用纳米级原子力显微镜探针尖端作为工具。尖端运动将被高精度控制，以选择性地去除工件材料，以形成各种凸凹形状，例如槽、壁和凹穴。教育目标包括让研究生和本科生参与纳米制造研究，并将研究成果纳入到 PI 名为“微/纳米制造”的新课程中，从而将研究结果转移到课堂上。 卡内基梅隆大学和匹兹堡公立学校的现有基础设施将用于吸引高中生和教师进行纳米制造研究。如果成功，该研究将通过扩展当前纳米级形状生成的能力来推进纳米技术领域。该技术有潜力克服当前的限制，并显着提高当前的纳米制造能力。纳米铣削技术的优点包括创建任意三维形状的能力、适用于多种材料的选择、纳米制造设计的简单性以及集成到现有微米和纳米制造技术中的能力。纳米铣削工艺与其他纳米制造工艺的集成也可能使得在产量和几何能力之间找到最佳平衡。此外，其低成本和简单性将允许通过并行操作扩大体积。该项目还将有助于理解纳米尺度的材料特性和力学行为。所开发的技术将对纳米流体、纳米电子、纳米医学、纳米机电系统和纳米机器人等新兴领域产生重要影响，从而对美国纳米制造的竞争力产生积极影响。