MRI: ACQUISITION OF DEEP REACTIVE ION ETCHING TOOL FOR INTERDISCIPLINARY RESEARCH AT THE UNIVERSITY OF SOUTH FLORIDA

MRI：南佛罗里达大学购买深反应离子蚀刻工具用于跨学科研究

• 批准号: 0619653
• 负责人: Shekhar Bhansali
• 金额: --
• 依托单位: University of South Florida
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2006
• 资助国家: 美国
• 起止时间: 2006-09-15 至 2007-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0619653&HistoricalAwards=false
• 关键词: MRI; ACQUISITION; DEEP; REACTIVE; ION

The objective of this research is to augment the MEMS and micro/nanotechnology research programs at the University of South Florida through the acquisition of a Deep Reactive Ion Etching (DRIE) tool (configured for deep silicon, dielectric and SiC etching) and a surface profilometer. The approach is to leverage: (a) on numerous USF research and training awards, (b) an interdisciplinary research culture that has a broad social participation of faculty and students. The instrumentation described in this proposal will provide the impetus to drive research in micro/nanotechnology as well as serve as an educational spring-board for engineers and scientists of tomorrow. Intellectual Merit: The requested instrumentation will be a major addition to the infrastructure of the research center - NNRC and the university. They would embellish the existing assortment of tools at the researchers' disposal. Proposed research will integrate developments in different research areas in a novel approach that will advance the knowledge and understanding in diverse fields, from understanding to sensing. The research tool will provide a basis for fabrication of systems for quantitative diagnosis in diverse environments. Broader Impact: This research will train students in emerging cross-disciplinary areas. The current research activities will have continued participation of undergraduate students and underrepresented groups (minority, women). It is anticipated that over 30 minority students will benefit from the acquisition in the first year. The results of the research will be widely disseminated through inclusion in courses and modules developed by PIs, demonstrations and outreach.

本研究的目的是通过收购深反应离子蚀刻（DRIE）工具（配置为深硅，电介质和SiC蚀刻）和表面轮廓仪，以增强南佛罗里达大学的MEMS和微/纳米技术研究计划。办法是利用：（a）获得了许多USF研究和培训奖项，（B）跨学科的研究文化，教师和学生广泛参与社会。该提案中描述的仪器将为推动微/纳米技术的研究提供动力，并为未来的工程师和科学家提供教育跳板。智力优势：所要求的仪器将是研究中心- NNRC和大学基础设施的主要补充。他们会修饰研究人员现有的各种工具。拟议的研究将以一种新的方法整合不同研究领域的发展，这将促进从理解到感知的不同领域的知识和理解。 该研究工具将为在不同环境中制造定量诊断系统提供基础。 更广泛的影响：这项研究将培养学生在新兴的跨学科领域。目前的研究活动将继续有本科生和代表性不足的群体（少数民族，妇女）的参与。预计第一年将有30多名少数民族学生受益。研究结果将通过纳入方案执行机构编制的课程和单元、示范和外联等方式广泛传播。