A Microfabricated Neural Electrode Array Technology for Long-Term Implant Applications

本研究的目的是开发一种灵活的神经微电极阵列平台技术，该平台技术不受水溶液的影响，因此适用于长期(~20年)的医疗植入物。方法是开发一种适用于聚合物基板的碳化硅薄膜技术，将这些薄膜用作机械耐用、生物兼容的密封涂层。这些薄膜将与用于集成电路但尚未开发用于生物医学微系统的前体一起沉积。将使用一系列常规测试评估设备原型的机械耐用性、化学和密封完整性、介电质量和生物兼容性。有限元模型将被用来根据测试结果开发改进的设计。从材料的角度来看，这项研究通过专注于温度敏感的衬底来推动碳化硅沉积技术的极端。从技术角度来看，这项研究解决了下一代神经植入物面临的一个关键问题：机械柔性微电极阵列的密封，该阵列配备了电子和无线遥测。除了神经假体，该项目还将影响其他吸湿的植入式微系统的发展，如视网膜假体、泌尿外科和心脏传感器系统，以及非医疗应用，如柔性显示器和便携式电源。这项研究赞扬了退伍军人事务部为残疾退伍军人开发微系统技术的努力，特别是那些遭受瘫痪和肢体丧失的退伍军人。这些技术也将使非退伍军人受益。这项研究将通过让代表人数不足的群体和当地高中的学生参与进来，对全国的技术劳动力产生积极影响。

The objective of this research is to develop a flexible neural microelectrode array platform technology that is impervious to aqueous solutions and thus suitable for long-term (~ 20 year) medical implants. The approach is to develop a silicon carbide thin film technology suitable for polymer substrates using these films as mechanically-durable, biocompatible, hermetic coatings. The films will be deposited with a precursor used in integrated circuits but has not been developed for biomedical microsystems. Device prototypes will be evaluated for mechanical durability, chemical and hermetic integrity, dielectric quality and biocompatibility using a battery of conventional tests. Finite element modeling will be used to develop improved designs based on testing results.From the materials perspective, this research pushes the extremes of silicon carbide deposition technology by focusing on temperature-sensitive substrates. From the technology perspective, this research addresses a critical issue facing next-generation neural implants; hermetic sealing of mechanically flexible microelectrode arrays equipped with electronics and wireless telemetry. In addition to neural prosthetics, this project will impact the development of other implantable microsystems that suffer from moisture absorption, such retinal prostheses, urologic and cardiac sensor systems, as well as non-medical applications, such as flexible displays and portable power. This research compliments an effort by the Department of Veteran's Affairs to develop microsystem technologies for disabled veterans, specifically those that suffer from paralysis and limb loss. Such technologies will also benefit the non-veteran population. This research will positively impact the nation's technology workforce by involving students from underrepresented groups and local high schools.