SBIR Phase I: Submicron Thick Nanostructured Diamond Films

这项小型企业创新研究（SBIR）第一阶段项目旨在研究超光滑硬纳米结构金刚石（NSD）应用于亚微米厚x射线窗口的可行性。在高速分拣金属废料时，与废料间歇接触的微米厚薄膜必须坚固、坚硬、有附着力、抗裂、对x射线透明，并在亚微米尺度上进行结构。此外，在光刻图案戳记中的应用需要在亚微米尺寸的特征上进行类似的严格磨料磨损。该SBIR的目的是研究NSD在独立薄膜中的成核、强度和x射线特性。研究内容为：独立亚微米NSD膜生长支撑网格的设计，选定支撑网格的粘附优化方法，基于NSD膜的原型x射线窗口的设计，NSD x射线窗口的测试。这项SBIR研究的预期结果包括关于亚微米薄膜的x射线透明度、粘附性和磨料磨损性能的第一个NSD数据。在亚微米和纳米范围内，硬的、超光滑的、粘附的NSD薄膜的商业价值正在探索中。对于具有极端性能的微米和亚微米薄膜的需求可以立即在遭受磨损和磨损的辐射窗口和光刻类工具中找到。商业价值的证据是，该公司支持这项研究，可以立即应用于x射线窗口。这些涂料和薄膜的应用发现了商业价值，因为它们延长了产品的寿命，减少了污染，减少了能源的使用，并促进了有效的回收利用。每一项成果都对社会产生了具体的、可量化的积极影响。

This Small Business Innovation Research (SBIR) Phase I project proposes to investigate thefeasibility of using hard ultra-smooth nanostructured diamond (NSD) for application insubmicron thick X-ray windows. In terms of sorting metal scrap at high speed with a micron-thick film intermittently in contact with scrap, the film must be strong, hard, adherent, crack resistant, transparent to X-rays and structured on a submicron scale. Furthermore, applications in lithography-pattern stamps require similar rigorous abrasive wear on submicron sized features. The objective of this SBIR is to investigate NSD nucleation, strength, and X-ray properties in a thin, free-standing film. The research to be conducted is: the design of support grids for the growth of free-standing submicron NSD film, methodology of optimizing adherence on selected support grids, design of prototype X-ray window based on NSD film, and testing of NSD X-ray windows. The anticipated results of this SBIR research include the first NSD data on X-ray transparency, adherence, and the abrasive-wear properties of submicron film.The commercial value of hard, ultra-smooth, adherent NSD films in the submicron and nano-ranges is just now being explored. The need for micron and submicron films that have extreme properties can be immediately found in radiation windows and lithography-like tools subjected to abrasion and wear. Evidence of the commercial value is found in the wTe company support of this research for immediate application in X-ray windows. The application of these coatings and films find commercial value in that they extend life of products, reduce pollution, reduce energy use and facilitate efficient recycling. Each of these outcomes has specific, quantifiable positive effects for society.