CAREER: Dielectrically Transduced MEMS Resonators for Communication and Computation

职业：用于通信和计算的介电转换 MEMS 谐振器

• 批准号: 0644868
• 负责人: Sunil Bhave
• 金额: --
• 依托单位: Cornell University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-01-15 至 2012-12-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0644868&HistoricalAwards=false
• 关键词: CAREER; Dielectrically; Transduced; MEMS; Resonators

This CAREER proposal focuses on the design of solid- and liquid-dielectric transduced, high Q, low impedance MEMS resonators. By mechanically coupling these resonators the PI will demonstrate tunable channel-select filters for frequency-agile radios and synchronized oscillators for on-chip clock distribution.Intellectual Merit: The PI will develop new tuning techniques using orthogonal electrodes and liquid dielectrics to tune GHz bulk acoustic resonators. Implementation and testing of resonator arrays will give crucial insight regarding substrate coupling between resonators and degradation in Q through both substrate and dielectric transducer. By designing a synchronized oscillator array on a single-chip, the PI will provide a chip-level tool-kit to study the collective behavior of a large population of micromechanical oscillators.Broader Impact: This research will provide the academic community with an accurately modeled library of dielectrically-transduced MEMS resonators. Initial calculations predict that incorporating tunable MEMS filters into cell-phones will reduce the weight of the phone by 15% and increase battery life by 24%. A successful demonstration of mechanical synchronization of MEMS oscillators will reduce the power consumption of a Pentium 4 microprocessor by 30%. In conjunction with this research, the PI will develop a senior-level MEMS course that combines the fundamentals of electro-mechanics, thin-films, fluidics and the applications of these principles to MEMS devices. The PI has demonstrated a concrete commitment to the development of women engineers: two of his three graduate students are women. The PI organizes workshops through the CNS Institute for Physics Teachers for high-school students and teachers on nanomechanics and forces.

本CAREER提案的重点是固体和液体介电转换，高Q，低阻抗MEMS谐振器的设计。通过机械耦合这些谐振器，PI将演示用于频率捷变无线电的可调谐通道选择滤波器和用于片上时钟分配的同步振荡器。智力优势：PI将开发新的调谐技术，使用正交电极和液体微扰来调谐GHz体声波谐振器。谐振器阵列的实现和测试将提供关键的洞察力，关于基板之间的耦合谐振器和Q退化通过基板和介电换能器。通过在单芯片上设计一个同步振荡器阵列，PI将提供一个芯片级的工具包来研究大量微机械振荡器的集体行为。更广泛的影响：这项研究将为学术界提供一个精确建模的介电转换MEMS谐振器库。初步计算预测，将可调MEMS滤波器集成到手机中将使手机重量减轻15%，电池寿命增加24%。MEMS振荡器的机械同步的成功演示将使奔腾4微处理器的功耗降低30%。在这项研究的同时，PI将开发一个高级MEMS课程，结合机电，薄膜，流体的基础知识和这些原则的MEMS器件的应用。PI表现出了对女性工程师发展的具体承诺：他的三名研究生中有两名是女性。PI通过CNS物理教师研究所为高中学生和教师组织关于纳米力学和力的研讨会。