SBIR Phase II: A Quality Monitor for Enabling Water Recycling in Semiconductor Processing - The Particle Scout

SBIR 第二阶段：用于实现半导体加工中水回收的质量监控器 - The Particle Scout

• 批准号: 0646557
• 负责人: Bingrong He
• 金额: --
• 依托单位: Uncopiers, Inc.
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-03-15 至 2011-02-28
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0646557&HistoricalAwards=false
• 关键词: SBIR; Phase; II; Quality; Monitor

This Small Business Innovation Research (SBIR) Phase II Project concerns Ultrapure Water (UPW), the life blood of the semiconductor industry. The proposed instrument seeks to satisfy the ITRS requirements on two counts: 1. full flow inspection, and 2. detection of sub-100nm liquid-borne particles. 1. A typical semiconductor fab uses about 3 million gallons of UPW every day, and the ITRS, in its attempt to conserve the precious resource, water, mandates that 90% of UPW be recycled/reused by 2010. The recycled UPW loop will need full flow monitoring, which the proposed Particle Scout will do. 2. The purity of UPW directly affects the chip yield, because the final operation on wafers is UPW rinse and any contaminants present in the UPW contaminate the wafers it rinses. As the industry moves to sub-100 nm nodes the ITRS particle detection requirements fall to sub-50 nm. "Particle Scout" for monitoring in real-time the particulate purity of recycled UPW for use inSemiconductor processing successfully overcomes a critical technological barrier facing the ICmanufacturing industry today. Beyond IC manufacturing industry it will find applications in allenterprises where UPW is used: Power generation, Nuclear Reactors, Pharmaceutical industry,Biotechnology, Space exploration, and processing of Advanced high purity chemicals.

这个小型企业创新研究（SBIR）二期项目涉及超纯水（UPW），半导体行业的命脉。拟议的文书力求在两个方面满足国际会计准则的要求：2.全流量检查；100nm以下液载颗粒检测。1. 一个典型的半导体工厂每天使用大约300万加仑的UPW，而ITRS为了保护宝贵的资源——水，要求到2010年90%的UPW被回收/再利用。回收的UPW循环将需要全流量监测，这是粒子侦察员将做的。2. UPW的纯度直接影响芯片产量，因为对晶圆的最终操作是UPW冲洗，UPW中存在的任何污染物都会污染它冲洗的晶圆。随着行业向100纳米以下节点移动，ITRS颗粒检测要求降至50纳米以下。“粒子侦察兵”用于实时监测用于半导体加工的回收UPW的颗粒纯度，成功克服了当今半导体制造业面临的关键技术障碍。在集成电路制造行业之外，它将在所有使用UPW的企业中找到应用：发电，核反应堆，制药工业，生物技术，太空探索和先进高纯度化学品的加工。