SGER: Exploratory Theoretical Study of Differential Surface Charging of Nanopatterned Dielectric Materials

SGER：纳米图案介电材料差异表面充电的探索性理论研究

• 批准号: 0650536
• 负责人: Gyeong Hwang
• 金额: $ 3.6万
• 依托单位: University of Texas at Austin
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2006
• 资助国家: 美国
• 起止时间: 2006-10-01 至 2007-09-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0650536&HistoricalAwards=false
• 关键词: SGER; Exploratory; Theoretical; Study; Differential

Award Number: CTS-0650536Principal Investigator: Gyeong HwangAffiliation: University of TexasProposal Title: SGER: Exploratory Theoretical Study of Differential Charging of Nanopatterned Dielectric MaterialsThis main objective of this work is to determine how nanoscale dimensions affect the plasma processing problem of surface charging. As charges build up on an exposed insulating surface, the energy, flux, and trajectory of incoming ions can be altered, preventing or distorting the process they are supposed to achieve. This problem has been studied previously at the continuum scale by trajectory methods. However, at the nanoscale, a single ion can also affect the local electric field when it joins the surface. That feature and features around it may be affected, particularly including trenches. The techniques that will be used are reasonably well established, but the question of nanoscale distortions has not been explored. If it proves significant, it would lead to a range of technological and scientific challenges to be addressed further.

项目编号：cts -0650536首席研究员：Gyeong hwang合作单位：德克萨斯大学提案题目：SGER：纳米化介电材料的差分充电的探索性理论研究本工作的主要目的是确定纳米尺度尺寸如何影响表面充电的等离子体处理问题。当电荷在暴露的绝缘表面上积聚时，进入的离子的能量、通量和轨迹就会改变，从而阻止或扭曲它们应该达到的过程。这一问题已经在连续尺度上用轨迹方法进行了研究。然而，在纳米尺度上，当单个离子连接到表面时，也可以影响局部电场。该功能及其周围的功能可能会受到影响，特别是包括战壕。将要使用的技术已经相当成熟，但是纳米尺度的扭曲问题还没有被探索。如果它被证明是重要的，它将导致一系列需要进一步解决的技术和科学挑战。