SGER: Exploratory Theoretical Study of Differential Surface Charging of Nanopatterned Dielectric Materials

奖项编号：CTS-0650536首席研究员：京黄附属公司：德克萨斯大学提案标题：SGER：纳米级介质材料差异充电的探索性理论研究这项工作的主要目标是确定纳米尺度如何影响表面充电的等离子体处理问题。当电荷在暴露的绝缘表面上积累时，进入离子的能量、通量和轨迹可能会改变，从而阻止或扭曲它们本应实现的过程。这个问题以前已经通过轨迹方法在连续介质尺度上进行了研究。然而，在纳米尺度上，单个离子加入表面时也会影响局部电场。这一特征及其周围的特征可能会受到影响，特别是包括战壕。将要使用的技术已经相当成熟，但纳米级扭曲的问题还没有被探索。如果它被证明是重要的，它将导致一系列需要进一步解决的技术和科学挑战。

Award Number: CTS-0650536Principal Investigator: Gyeong HwangAffiliation: University of TexasProposal Title: SGER: Exploratory Theoretical Study of Differential Charging of Nanopatterned Dielectric MaterialsThis main objective of this work is to determine how nanoscale dimensions affect the plasma processing problem of surface charging. As charges build up on an exposed insulating surface, the energy, flux, and trajectory of incoming ions can be altered, preventing or distorting the process they are supposed to achieve. This problem has been studied previously at the continuum scale by trajectory methods. However, at the nanoscale, a single ion can also affect the local electric field when it joins the surface. That feature and features around it may be affected, particularly including trenches. The techniques that will be used are reasonably well established, but the question of nanoscale distortions has not been explored. If it proves significant, it would lead to a range of technological and scientific challenges to be addressed further.