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Mechanical Behavior of Amorphous Plasma-Enhanced Chemical Vapor Deposited Silicon Oxide Films for MEMS Applications

用于 MEMS 应用的非晶等离子体增强化学气相沉积氧化硅薄膜的机械性能

基本信息

批准号：
0700688
负责人：
Xin Zhang
金额：
--
依托单位：
Trustees of Boston University
依托单位国家：
美国
项目类别：
Standard Grant
财政年份：
2007
资助国家：
美国
起止时间：
2007-06-01 至 2011-08-31
项目状态：
已结题

来源：
https://www.nsf.gov/awardsearch/showAward?AWD_ID=0700688&HistoricalAwards=false
关键词：
Mechanical Behavior Amorphous Plasma Enhanced

项目摘要

Amorphous thin film materials are more and more commonly adopted in the emerging new applications of MEMS. However, their mechanical behavior is still not yet nearly well understood as compared with their crystalline counterparts. The overall objective of this work is to contribute to the scientific understanding of the causal mechanisms of the mechanical responses of amorphous thin film materials so as to permit the design and construction of efficient MEMS structures and devices. Specifically, mechanical responses of the plasma-enhanced chemical vapor deposited silicon oxide thin films will be probed under different thermal conditions, stress levels, size scales, and in both elastic and plastic regions. Various distinctive characteristics of the mechanical behaviors of the thin films will be characterized systematically, and the underlying physical causal mechanisms will be analyzed in depth. Educationally, given the broad interdisciplinary nature of this research, graduate students will have an outstanding opportunity to work in an area that bridges basic research and application. In addition, two to three undergraduate researchers will be hired to work on this project, and women and minority students will be included via the University's collaborative relationship with the Society of Women Engineers and Minority Engineers Society.

非晶态薄膜材料在MEMS的新兴应用中得到了越来越广泛的应用。然而，与它们的晶体相比较，它们的力学行为仍然没有被很好地理解。这项工作的总体目标是有助于科学地理解非晶态薄膜材料机械响应的原因机制，以便能够设计和建造高效的MEMS结构和器件。具体地说，将探索等离子体增强化学气相沉积二氧化硅薄膜在不同的热条件、应力水平、尺寸尺度以及在弹性区和塑性区的力学响应。将系统地表征薄膜的各种不同的机械行为特征，并深入分析其潜在的物理原因机制。在教育方面，考虑到这项研究的广泛跨学科性质，研究生将有一个绝佳的机会在一个连接基础研究和应用的领域工作。此外，将聘请两到三名本科生研究人员参与这一项目，并将通过大学与女性工程师协会和少数民族工程师协会的合作关系将妇女和少数族裔学生包括在内。