Miniaturized magnetostrictive strain sensors for novel applications of atomic force microscopy

用于原子力显微镜新应用的微型磁致伸缩应变传感器

基本信息

批准号：
181655085
负责人：
Professor Dr. Hendrik Hölscher
金额：
--
依托单位：
Institut für Mikrostrukturtechnik (IMT)
依托单位国家：
德国
项目类别：
Research Grants
财政年份：
2010
资助国家：
德国
起止时间：
2009-12-31 至 2016-12-31
项目状态：
已结题

来源：
https://gepris.dfg.de/gepris/projekt/181655085?language=en
关键词：
Miniaturized magnetostrictive strain sensors novel

项目摘要

Based on the results of the first application period we will use magnetostrictive tunneling structures as highly sensitive strain sensors to enable new applications of atomic force microscopy with self-sensing cantilevers. With this aim, the miniaturization of the strain-sensitive tunneling structures will be pushed forward to submicron scales and supported by micromagnetic simulations. The comparison between simulation and experiment will contribute to the understanding of the magnetization reversal in mechanically stressed magnetostrictive structures, finally leading to an increased control of their magnetization configurations. This in turn has a direct impact on the long-term stability of the sensors.Through the planned development of the layer system of tunneling structures, we aim on the one hand on the increase of sensitivity and signal to noise ratio. On the other hand, an internal magnetic bias field will be implemented into the layer system, in order to eliminate the need for an external bias field to measure at an optimal operating point. For this purpose we will apply the concept of a sensor electrode coupled to an antiferromagnetic layer sensor, which has been very successful in solving a similar problem with magnetoelectric magnetic field sensors.With these new self-sensing cantilevers we will carry out atomic force microscopy experiments under ambient conditions, in vacuum, and in liquids on different sample systems. Our focus is on applications where conventional optical detection system of conventional AFMs can be detrimental. Furthermore, we will build and analyze cantilevers with multiple strain sensors for friction force and multi-frequency measurements.

根据第一个申请期的结果，我们将使用磁性隧道结构作为高度敏感的应变传感器，以使原子力显微镜与自感应悬臂的新应用。以此目的，应应变敏感的隧道结构的微型化将被推向亚微米尺度，并由微磁模拟支持。模拟与实验之间的比较将有助于理解机械应力的磁静脉结构中磁化逆转的理解，最后导致对其磁化构型的控制增加。这反过来又对传感器的长期稳定性产生了直接影响。通过计划的隧道结构层系统的开发，我们的目标是提高灵敏度和信号噪声比。另一方面，将在图层系统中实现内部磁性偏置字段，以消除对最佳操作点测量外部偏置字段的需求。为此，我们将应用耦合到抗铁磁层传感器的传感器电极的概念，该传感器在解决磁电磁场传感器的类似问题方面非常成功。这些新的自感悬臂在环境条件下，在真空液体和不同样品中，我们将进行原子力显微镜显微镜实验。我们的重点是传统AFMS常规光学检测系统可能有害的应用。此外，我们将使用多个应变传感器来构建和分析悬臂，用于摩擦力和多频测量。