Spectroscopic Diagnostics for Low Temperature Industrial Plasmas

低温工业等离子体的光谱诊断

• 批准号: 0714600
• 负责人: Amy Wendt
• 金额: $ 27万
• 依托单位: University of Wisconsin-Madison
• 依托单位国家: 美国
• 项目类别: Continuing Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-07-01 至 2011-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0714600&HistoricalAwards=false
• 关键词: Spectroscopic; Diagnostics; Low; Temperature; Industrial

National Science FoundationNSF/DOE Partnership in Basic Plasma Science and EngineeringProposal Number: CBET-0714600Principal Investigator: Wendt, Amy E. Affiliation: University of Wisconsin-MadisonProposal Title: Spectroscopic Diagnostics for Low Temperature Industrial Plasmas New diagnostic strategies for industrial plasmas will be developed and tested, based on sophisticated use of non-invasive and relatively straightforward optical emission spectra (OES) measurements. To that end, a new, cross-disciplinary team has been assembled, combining laboratory expertise in both atomic physics and plasma processing. The new techniques in this work are enabled by recent measurements of cross sections for electron impact excitation in rare gases made in the laboratory of co-PI Prof. Chun Lin. The ability to measure many cross sections rapidly will allow the PIs to identify special combinations of wavelengths for which the ratio of emitted light intensities can be used to determine plasma properties directly. The new methods will first be evaluated on a test plasma system by comparing results with more established diagnostics and then will be implemented on a more chemically complex processing plasma. The central idea used is that all plasmas radiate a characteristic glow ("optical emission"), and the spectrum of the emitted light carries information about the properties of the plasma from which it comes. Scientific insights and data from this project will thus benefit the extraordinary range of processes using plasmas. Plasma processing is most widely known as being vital to computer-chip manufacturing, but plasma usage extends to such varied applications as electric propulsion for long-range space missions, plasma display televisions and plasma-based surgical tools. Understanding and characterization of plasma conditions is essential to the predictive capability needed as processes become more refined and applications more varied. Unfortunately, many other diagnostics have been applied to industrial plasmas with mixed success. They are often difficult to implement or interpret, they may perturb or contaminate the plasma, or they may require highly specialized training, rendering them impractical in an industrial environment.Work from this project will thus add not only to impact on science but also on diverse important technologies and to education. In particular, basic knowledge from these studies is likely to aid effective use and development of plasma-processing tools. Furthermore, the results will be incorporated into courses at Wisconsin, undergraduate and graduate students will have valuable training in research skills. The project is also likely to have important influences on raising under-represented populations in engineering and science, especially in female participation as the lead PI has a strong track record in attracting female graduate-student participation.

美国国家科学基金会(nsf) /美国能源部基础等离子体科学与工程伙伴关系提案编号：cbet -0714600首席研究员：Wendt， Amy E.隶属关系：威斯康星大学麦迪逊分校提案标题：低温工业等离子体的光谱诊断新诊断策略将开发和测试，基于非侵入性和相对直接的光学发射光谱（OES）测量的复杂使用。为此，他们组建了一个新的跨学科团队，结合了原子物理学和等离子体处理方面的实验室专业知识。这项工作中的新技术是通过最近在Lin Chun教授的实验室中对稀有气体中电子撞击激发的截面进行测量而实现的。快速测量许多横截面的能力将允许pi识别波长的特殊组合，发射光强度的比例可以用来直接确定等离子体的性质。新方法将首先在测试等离子体系统上进行评估，将结果与更成熟的诊断结果进行比较，然后将在化学更复杂的处理等离子体上实施。所使用的中心思想是，所有的等离子体都辐射出一种特征光（“光发射”），而发射光的光谱携带着等离子体的特性信息。因此，来自该项目的科学见解和数据将有利于使用等离子体的非凡范围的过程。众所周知，等离子体处理对于计算机芯片制造至关重要，但等离子体的使用扩展到远程太空任务的电力推进、等离子显示电视和基于等离子体的手术工具等各种应用。随着工艺越来越精细，应用越来越多样化，对等离子体条件的理解和表征对于所需的预测能力至关重要。不幸的是，许多其他诊断方法已应用于工业等离子体，但成败参半。它们通常难以实现或解释，它们可能会干扰或污染等离子体，或者它们可能需要高度专业化的培训，使它们在工业环境中不切实际。因此，该项目的工作不仅将增加对科学的影响，还将增加对各种重要技术和教育的影响。特别是，从这些研究中获得的基础知识可能有助于有效地使用和开发等离子体处理工具。此外，研究结果将被纳入威斯康星大学的课程，本科生和研究生将在研究技能方面得到宝贵的培训。该项目还可能对提高工程和科学领域代表性不足的人口，特别是在女性参与方面产生重要影响，因为首席PI在吸引女性研究生参与方面有着良好的记录。