SGER: Microfabrication Approaches for Microscale Permanent Magnets

SGER：微型永磁体的微加工方法

• 批准号: 0716139
• 负责人: David Arnold
• 金额: --
• 依托单位: University of Florida
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-05-01 至 2008-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0716139&HistoricalAwards=false
• 关键词: SGER; Microfabrication; Approaches; Microscale; Permanent

The long-term technical goal of this proposal is to enable high-performance, fully-integrated, micromagnetic transducers for microscale sensors, actuators, and power converters. Magnetic and electrodynamic transducers can offer significant performance advantages (efficiency, reliability) over other electromechanical transduction approaches, especially for applications that demand high stroke and/or high power density. Currently however, certain design and fabrication issues prevent the practical implementation of microscale transducers that rely on permanent magnets. Most previously demonstrated micromagnetic devices use a hybrid fabrication approach, where conventionally-manufactured, mm-scale magnets are assembled into a micromachined structure. This approach constrains the device design, limits the minimum device size, and eliminates the benefits of wafer-scale microfabrication. These fabrication-related effects combine to hamper the performance and appeal of micromagnetic transducers.This exploratory proposal focuses on microfabrication process development efforts to overcome these fabrication and integration challenges. The immediate goal is to advance the state-of-the-art in microfabrication to permit the integration of high-performance permanent magnet materials within more complex micromachined structures. Efforts will focus on systematic and practical experiments to develop robust microfabrication procedures for deposition, process integration, and patterned-magnetization of high-performance permanent magnet films (electroplated magnetic alloy films and composite polymer/magnetic particle films) in silicon-based microstructures. Solving these fabrication-related issues is a necessary and critical step for the long-term development of fully-integrated, fully-microfabricated micromagnetic sensors and actuators.Intellectual Merit. This research will develop new microfabrication and micro-magnetization methods for permanent magnet thick-films. Development of robust integration methods for high-performance permanent magnet films will trigger an explosion of renewed interest in microscale magnetic transducers. With favorable physical scaling laws and decades of proven performance, miniaturized magnetic devices have only been limited by practical microfabrication challenges, specifically with permanent magnet films. This research will result in a roadmap for integration of permanent magnet films for MEMS. This will form the foundation and springboard for the PI's long-term development of magnetic microsystems such as microscale speakers, valves, pumps, motors, energy harvesters, etc.Broader Impact. The research program will provide an educational opportunity to train graduate and undergraduate engineers with practical engineering design and development principles. The PI plans to maximize the participation of underrepresented groups by leveraging his ongoing relationships with established programs at UF such as the University Scholars program and the NSF-sponsored South East Alliance for Graduate Education and the Professoriate (SEAGEP) program. Technical results will be disseminated through conference presentations, archival publications, and workshops. With these results, collaborations will be sought with US and European industrial partners to develop and commercialize new micromagnetic products for biomedical, aerospace, and consumer electronic applications.

这项提议的长期技术目标是实现用于微型传感器、执行器和功率转换器的高性能、完全集成的微磁传感器。与其他机电换能器相比，磁力和电动换能器可以提供显著的性能优势(效率、可靠性)，特别是对于需要高行程和/或高功率密度的应用。然而，目前，某些设计和制造问题阻碍了依赖永磁体的微型换能器的实际实施。大多数以前展示的微磁设备使用混合制造方法，其中传统制造的毫米级磁体被组装成微机械结构。这种方法限制了器件设计，限制了最小器件尺寸，并消除了晶片规模微制造的好处。这些与制造相关的效应共同阻碍了微磁换能器的性能和吸引力。这项探索性建议集中在微制造工艺开发方面，以克服这些制造和集成方面的挑战。近期的目标是推进最先进的微制造技术，使高性能永磁体材料能够集成到更复杂的微机械结构中。我们将致力于系统和实际的实验，为硅基微结构中的高性能永磁薄膜(电镀磁性合金薄膜和聚合物/磁性颗粒复合薄膜)的沉积、工艺集成和图案化磁化开发强有力的微制造程序。解决这些与制造相关的问题是全集成、全微制造微磁传感器和执行器长期发展的必要和关键步骤。这项研究将为永磁体厚膜开发新的微细加工和微磁化方法。高性能永磁膜的稳健集成方法的发展将引发人们对微尺度磁性换能器的新的兴趣。凭借良好的物理比例定律和几十年的成熟性能，小型化磁性设备仅受到实际微制造挑战的限制，特别是永磁膜。这项研究将为MEMS永磁膜的集成提供一个路线图。这将为PI的磁性微系统的长期发展奠定基础和跳板，例如微型扬声器、阀门、泵、电机、能量收集器等。该研究计划将提供一个教育机会，培养具有实用工程设计和开发原则的研究生和本科生工程师。PI计划通过利用他与密歇根大学现有项目的持续关系，最大限度地提高未被充分代表的群体的参与，这些项目包括大学学者计划和NSF赞助的东南研究生教育联盟和教授计划(SEAGEP)。技术成果将通过会议报告、档案出版物和讲习班传播。有了这些成果，将寻求与美国和欧洲的工业合作伙伴合作，开发用于生物医学、航空航天和消费电子应用的新型微磁产品并将其商业化。