MRI: Acquisition of an Environmental Scanning Electron Microscope for Visualization, Characterization and Manipulation of Nanoscale Systems

MRI：获取环境扫描电子显微镜，用于纳米级系统的可视化、表征和操作

• 批准号: 0722981
• 负责人: Jack Beuth
• 金额: $ 49.83万
• 依托单位: Carnegie-Mellon University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-08-01 至 2011-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0722981&HistoricalAwards=false
• 关键词: MRI; Acquisition; Environmental; Scanning; Electron

The objective of this project is to acquire a high resolution environmental scanning electron microscope (ESEM) with atomic force microscope (AFM) and hot stage attachments for use in a broad array of research and education projects. The ESEM will be located in an open-access laboratory within the Carnegie Mellon University engineering college. Key advantages of this system over conventional SEM equipment are its ability to image specimens at elevated temperatures (up to 1000 deg. C), imaging of specimens that are not conductive (such as ceramics and polymers) and low vacuum imaging, ideal for biosystems in ?wet? environments. Furthermore, integrated AFM capabilities allow topological imaging, metrology and in-situ nano-scale probing of samples as they are observed in the SEM. Prior to this award, no ESEM equipment existed on the CMU campus and none was available at nearby institutions. Research and education projects impacted by acquisition of this equipment span the Carnegie Mellon Engineering College, and include projects in the CMU Mellon College of Science and the University of Pittsburgh Department of Mechanical Engineering and Materials Science. Broader Impacts:Miniaturization and nano-scale visualization technologies developed over the last two decades have created a new frontier in engineering research, focused on physical phenomena at the micro and nano scales. Carnegie Mellon researchers in mechanics, materials, biomedical engineering, biology and areas that combine these disciplines require sub-micron imaging, characterization, manipulation and in-situ experimentation capabilities for their research. Acquisition of this ESEM equipment will have significant impact in furthering our understanding of fundamental phenomena at the micro/nano size scales in a broad range of application areas. The University of Pittsburgh has needs for an ESEM that are nearly identical to those of CMU. Access to ESEM equipment at CMU will also have a dramatic impact on their research capabilities. Carnegie Mellon also sees ESEM use in the study of micro- and nanoscale systems as strategically critical in the education of future engineers at the pre-college, undergraduate and graduate levels. This networked equipment will allow not only ?broadcasting? of SEM images to laboratory or classroom environments, but also remote control of some functions, greatly enhancing student learning. By using this equipment for undergraduate and graduate education, the PIs will significantly advance integration of micro/nano-scale research with education. The equipment will also be used to enhance existing outreach programs led by Carnegie Mellon.

该项目的目标是获得一个高分辨率的环境扫描电子显微镜（ESEM），原子力显微镜（AFM）和热阶段附件，用于广泛的研究和教育项目。ESEM将位于卡内基梅隆大学工程学院的一个开放存取实验室。与传统的扫描电镜设备相比，该系统的主要优点是能够在高温（高达1000摄氏度）下对样品进行成像，对不导电的样品（如陶瓷和聚合物）进行成像，以及低真空成像，非常适合在潮湿环境中进行生物系统成像。环境。此外，集成的AFM功能允许在扫描电镜中观察到的样品进行拓扑成像，计量和原位纳米级探测。在此之前，CMU校园内没有ESEM设备，附近的机构也没有。受该设备收购影响的研究和教育项目横跨卡内基梅隆工程学院，包括CMU梅隆科学学院和匹兹堡大学机械工程和材料科学系的项目。更广泛的影响：在过去的二十年中，小型化和纳米级可视化技术的发展为工程研究开辟了一个新的前沿，重点关注微观和纳米尺度的物理现象。卡内基梅隆大学的力学、材料、生物医学工程、生物学和结合这些学科的领域的研究人员需要亚微米成像、表征、操作和原位实验能力。该ESEM设备的收购将对我们在广泛的应用领域进一步了解微/纳米尺度上的基本现象产生重大影响。匹兹堡大学对ESEM的需求与CMU几乎相同。在CMU使用ESEM设备也将对他们的研究能力产生巨大影响。卡内基梅隆大学还认为，ESEM在微纳米级系统研究中的应用，对大学预科、本科和研究生阶段的未来工程师教育具有战略意义。这种联网设备不仅可以进行广播。将SEM图像传输到实验室或教室环境中，还可以远程控制一些功能，大大增强了学生的学习能力。通过将该设备用于本科和研究生教育，pi将显著推进微/纳米尺度研究与教育的整合。这些设备还将用于加强卡内基梅隆大学领导的现有外展项目。