MRI: Focused Ion Beam System for Nano Fabrication and Nano Machining of Materials

提案编号：cbet -0723224主要研究者：Abhaya DatyeINSTITUTION：新墨西哥大学提案标题：MRI：纳米制造和纳米材料加工的聚焦离子束系统知识价值该项目支持获取双束聚焦离子束（FIB）系统，该系统由用于成像的电子光学柱（环境扫描电子显微镜ESEM）和用于纳米级加工的离子柱组成。该仪器将配备一个用于微量分析的能量色散x射线光谱（EDS）系统，以及一个电子反向散射探测器（EBSD），以获得样品的衍射图样。这种能力的结合将使材料科学、工程、地球和行星科学的研究项目成为可能。化学工程学院将研究用于能量转换和污染控制的先进催化剂、耐用的燃料电池和用于低成本光伏发电的无缺陷Ge/Si。其他项目包括新型微流体装置、可能用于DNA测序的离子通道、生物膜中的细胞表面相互作用以及用于药物输送的气溶胶衍生颗粒。电气工程学院将使用该仪器提高激光器和红外探测器的效率，并在晶格不匹配材料的外延生长方面取得进展。机械和土木工程学院将帮助提高对机械性能的尺度效应的理解，特别是在纳米尺度上，并使晶界滑动和光子带隙材料的力学研究成为可能，作为检测关键设施损伤的传感器。FIB是研究复杂地质样品薄片的一种使能技术。地球和行星科学学院的研究包括在大陆碰撞过程中形成的高压变质岩中的变形和变质作用，以及地球上地幔中流体/岩石相互作用的性质。这项研究对认识地壳和地幔之间的地球化学相互作用具有重要意义。对岩石中磁性载体的详细研究将提高该大学了解古地磁记录的能力，而古地磁记录对于限制世界各地复杂地质地形的构造演化至关重要。最后，FIB将彻底改变研究太阳系中形成最早固体的特定区域的能力，这些固体是在美国宇航局星尘任务返回的碳质球粒陨石和彗星颗粒中发现的。这些珍贵的稀有样品必须通过FIB-SEM、离子探针和TEM等综合高空间分辨率技术进行结构、化学和同位素表征，以阐明其复杂的地层和热历史。更广泛的影响新墨西哥大学对这种制造和分析工具有巨大的需求，开放使用这种高科技设备对于促进新墨西哥州的科学和技术发展是必要的。新墨西哥大学五个系和至少两个其他新墨西哥州机构的教员将参与这个项目。教师的参与者从早期的职业助理教授到成熟的资深教师。由于新墨西哥大学是一所西班牙裔服务机构，因此来自弱势群体的大量学生将受益于这一设施。研究生、本科生和博士后都可以亲自使用这台仪器。该项目预计在该仪器全面投入使用后将有大约50个经常用户。他们将通过新课程的开发将研究融入到他们的学术项目中。通过使用这个设施进行外展和示范，他们也将接触到广泛的学生（K-12）。该仪器将放置在地球与行星科学系地下室的电子微束分析设施中。这座建筑是地质和陨石博物馆；这两个设施都吸引了大量来自大阿尔伯克基地区以及更远地区的学校的游客。他们计划在开放参观和招聘活动中扩大他们的分析仪器套件的使用，帮助他们将纳米制造的兴奋带给普通公众。FIB特别适合于展示我们进行纳米级加工的能力，并具有实时成像。该设施还将通过为新墨西哥州和其他地方的小型初创公司提供机会，帮助将研究想法转化为商业产品。

PROPOSAL NUMBER: CBET-0723224PRINCIPAL INVESTIGATOR: Abhaya DatyeINSTITUTION: University of New MexicoPROPOSAL TITLE: MRI: Focused Ion Beam System for Nano-Fabrication and Nano- Machining of MaterialsIntellectual MeritThe project supports the acquisition a dual beam Focused Ion Beam (FIB) system consisting of an electron optical column for imaging (an environmental scanning electron microscope ESEM) and an ion column that is used for nano-scale machining. The instrument will be equipped with an energy dispersive X-ray spectroscopy (EDS) system for microanalysis, and an electron back-scatter detector (EBSD) to obtain diffraction patterns of the sample. This combination of capabilities will enable research projects inmaterials science, engineering and earth and planetary sciences. Faculty in Chemical Engineering will study advanced catalysts for energy conversion and pollution control, durable fuel cells and defect free Ge/Si for low cost photovoltaics. Other projects include novel microfluidic devices, ion channels with potential use in DNA sequencing, cell-surface interactions in bio-films and aerosol derived particles for drug delivery. Faculty in Electrical Engineering will use the instrument for increasing efficiency of lasers and IR detectors and to make advances in epitaxial growth of lattice-mismatched materials. Faculty in Mechanical and Civil engineering will help improve understanding of scale effects on mechanical properties, particularly at the nanoscale and enable research on mechanics of grain boundary sliding and photonic band gap materials as sensors to detect damage in critical facilities. The FIB is an enabling technology to study thin sections of complex geological samples. Research by Faculty in Earth and Planetary Sciences includes studies of deformation and metamorphism in high pressure metamorphic rocks formed during continental collisions and the nature of fluid/rock interactions in the Earth's upper mantle. This research is essential for understanding the geochemical interactions between crust and mantle. Detailed studies of magnetic carriers in rocks will improve the university's ability to understand the paleomagnetic record that is essential for constraining the tectonic evolution of complex geologic terrains around the world. Finally, the FIB will revolutionize the ability to study sitespecific regions of the earliest solids formed in the solar system found in carbonaceous chondrites and cometary particles returned by the NASA STARDUST mission. Such rare and valuable samples must be characterized structurally, chemically and isotopically by integrated high spatial resolution techniques such as FIB-SEM, ion microprobe and TEM to elucidate their complex formational and thermal histories.Broader ImpactThere is tremendous need for this fabrication and analysis tool at UNM and open access to such a piece of high-tech equipment is necessary to foster the growth of science and technology in the state of New Mexico. Faculty from five departments at UNM and from at least two other New Mexico institutions will participate in this project. The faculty participants range from early career assistant professors to established senior faculty. Since UNM is a Hispanic Serving Institution, significant numbers of studentsfrom underrepresented groups will benefit from this facility. Graduate students, undergraduate students as well as post-docs will get hands-on access to this instrument. The project expects to have approximately 50 regular users for this instrument, after it becomes fully operational. They will integrate the research into their academic programs through new course development. By using this facility for outreach and demonstrations, they will also reach a broad cross section of students (K-12). The instrument will belocated in the Electron Microbeam Analysis Facility in the basement of the Department of Earth and Planetary Sciences. This building houses the Geology and Meteorite Museums; both facilities attract large numbers of tours from schools in the greater Albuquerque area as well as further a field. They plan to expand use of their suite of analytical instruments for demonstrations aimed at open house and recruiting events, helping them take the excitement of nanofabrication to the lay public. The FIB is particularly suited to demonstrate our abilities to perform nanoscale machining, with real time imaging. This facility will also help convert research ideas into commercial products, by providing access to small start-up companies in New Mexico and elsewhere.