MRI: Focused Ion Beam System for Nano Fabrication and Nano Machining of Materials

MRI：用于材料纳米制造和纳米加工的聚焦离子束系统

• 批准号: 0723224
• 负责人: Abhaya Datye
• 金额: $ 76.21万
• 依托单位: University of New Mexico
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2007
• 资助国家: 美国
• 起止时间: 2007-08-15 至 2009-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0723224&HistoricalAwards=false
• 关键词: MRI; Focused; Ion; Beam; System

PROPOSAL NUMBER: CBET-0723224PRINCIPAL INVESTIGATOR: Abhaya DatyeINSTITUTION: University of New MexicoPROPOSAL TITLE: MRI: Focused Ion Beam System for Nano-Fabrication and Nano- Machining of MaterialsIntellectual MeritThe project supports the acquisition a dual beam Focused Ion Beam (FIB) system consisting of an electron optical column for imaging (an environmental scanning electron microscope ESEM) and an ion column that is used for nano-scale machining. The instrument will be equipped with an energy dispersive X-ray spectroscopy (EDS) system for microanalysis, and an electron back-scatter detector (EBSD) to obtain diffraction patterns of the sample. This combination of capabilities will enable research projects inmaterials science, engineering and earth and planetary sciences. Faculty in Chemical Engineering will study advanced catalysts for energy conversion and pollution control, durable fuel cells and defect free Ge/Si for low cost photovoltaics. Other projects include novel microfluidic devices, ion channels with potential use in DNA sequencing, cell-surface interactions in bio-films and aerosol derived particles for drug delivery. Faculty in Electrical Engineering will use the instrument for increasing efficiency of lasers and IR detectors and to make advances in epitaxial growth of lattice-mismatched materials. Faculty in Mechanical and Civil engineering will help improve understanding of scale effects on mechanical properties, particularly at the nanoscale and enable research on mechanics of grain boundary sliding and photonic band gap materials as sensors to detect damage in critical facilities. The FIB is an enabling technology to study thin sections of complex geological samples. Research by Faculty in Earth and Planetary Sciences includes studies of deformation and metamorphism in high pressure metamorphic rocks formed during continental collisions and the nature of fluid/rock interactions in the Earth's upper mantle. This research is essential for understanding the geochemical interactions between crust and mantle. Detailed studies of magnetic carriers in rocks will improve the university's ability to understand the paleomagnetic record that is essential for constraining the tectonic evolution of complex geologic terrains around the world. Finally, the FIB will revolutionize the ability to study sitespecific regions of the earliest solids formed in the solar system found in carbonaceous chondrites and cometary particles returned by the NASA STARDUST mission. Such rare and valuable samples must be characterized structurally, chemically and isotopically by integrated high spatial resolution techniques such as FIB-SEM, ion microprobe and TEM to elucidate their complex formational and thermal histories.Broader ImpactThere is tremendous need for this fabrication and analysis tool at UNM and open access to such a piece of high-tech equipment is necessary to foster the growth of science and technology in the state of New Mexico. Faculty from five departments at UNM and from at least two other New Mexico institutions will participate in this project. The faculty participants range from early career assistant professors to established senior faculty. Since UNM is a Hispanic Serving Institution, significant numbers of studentsfrom underrepresented groups will benefit from this facility. Graduate students, undergraduate students as well as post-docs will get hands-on access to this instrument. The project expects to have approximately 50 regular users for this instrument, after it becomes fully operational. They will integrate the research into their academic programs through new course development. By using this facility for outreach and demonstrations, they will also reach a broad cross section of students (K-12). The instrument will belocated in the Electron Microbeam Analysis Facility in the basement of the Department of Earth and Planetary Sciences. This building houses the Geology and Meteorite Museums; both facilities attract large numbers of tours from schools in the greater Albuquerque area as well as further a field. They plan to expand use of their suite of analytical instruments for demonstrations aimed at open house and recruiting events, helping them take the excitement of nanofabrication to the lay public. The FIB is particularly suited to demonstrate our abilities to perform nanoscale machining, with real time imaging. This facility will also help convert research ideas into commercial products, by providing access to small start-up companies in New Mexico and elsewhere.

PROPOSAL NUMBER: CBET-0723224PRINCIPAL INVESTIGATOR: Abhaya DatyeINSTITUTION: University of New MexicoPROPOSAL TITLE: MRI: Focused Ion Beam System for Nano-Fabrication and Nano- Machining of MaterialsIntellectual MeritThe project supports the acquisition a dual beam Focused Ion Beam (FIB) system consisting of an electron optical column for imaging (an environmental scanning electron显微镜ESEM）和用于纳米级加工的离子柱。该仪器将配备用于微分析的能量分散X射线光谱（EDS）系统，并配备电子后丝网检测器（EBSD），以获得样品的衍射模式。这种能力的结合将使研究项目Inmaterials科学，工程和地球和行星科学。化学工程学院将研究用于能量转化和污染控制，耐用燃料电池和无缺陷的GE/SI的高级催化剂，用于低成本光伏。其他项目包括新型的微流体设备，在DNA测序中可能使用的离子通道，生物膜中的细胞表面相互作用以及用于药物输送的气溶胶衍生颗粒。电气工程的教师将使用该工具来提高激光和IR探测器的效率，并在晶格不匹配的材料的外延生长方面取得进步。机械和土木工程中的教师将有助于提高对机械性能的量表影响的理解，尤其是在纳米级，并能够研究晶界滑动和光子带隙材料的力学，作为传感器，以检测关键设施中的损害。 FIB是一种能够研究复杂地质样本的薄层的技术。地球和行星科学的教师的研究包括在大陆碰撞期间形成的高压变质岩石中的变形和变质研究，以及地球上地幔中流体/岩石相互作用的性质。这项研究对于理解地壳与地幔之间的地球化学相互作用至关重要。对岩石中磁载体的详细研究将提高大学理解古磁记录的能力，这对于约束世界各地复杂地质地形的构造演变至关重要。最后，FIB将彻底改变研究NASA Stardust Mission返回的碳质软管和彗星颗粒中最早形成的最早固体区域的固定区域。必须通过诸如FIB-SEM，离子微探针和TEM等集成的高空间分辨率技术在结构，化学和同位素上进行这种稀有和有价值的样品，以阐明其复杂的形成和热历史。实现了对这种高型设备的巨大制造和开放式技术，并开放了对新型设备的制造和开放式技术，以实现新的技术来进行新的技术，从而获得了新的技术。来自UNM的五个部门和至少两个新墨西哥州机构的教职员工将参加该项目。教职员工的范围从早期职业助理教授到成立的高级教师。由于UNM是一家西班牙裔服务机构，因此来自代表性不足的团体的大量学生将从该设施中受益。研究生，本科生以及毕业后，将动手访问此乐器。该项目完全运行后，该项目将拥有大约50个常规用户。他们将通过新的课程发展将研究纳入其学术课程。通过使用此设施进行外展和示威，他们还将到达广泛的学生（K-12）。该仪器将在地球和行星科学系的地下室的电子微束分析设施中占据。这座建筑设有地质和陨石博物馆；这两种设施都吸引了大阿尔伯克基地区学校的大量旅行以及更远的领域。他们计划将其套件的分析工具扩展到针对开放日的演示和招募活动，以帮助他们激发纳米制作的兴奋。 FIB特别适合通过实时成像来证明我们执行纳米级加工的能力。该设施还将通过提供与新墨西哥州和其他地方的小型初创公司的访问权限来帮助将研究思想转变为商业产品。