MRI: Focused Ion Beam System for Nano Fabrication and Nano Machining of Materials

建议编号：CBET-0723224 PRINCIPAL调查员：Abhaya DatyeInstant：新墨西哥大学PROPOSAL标题：MRI：用于材料纳米制造和纳米加工的聚焦离子束系统智能价值该项目支持收购一个由用于成像的电子光柱(环境扫描电子显微镜ESEM)和用于纳米级加工的离子柱组成的双束聚焦离子束(FIB)系统。该仪器将配备一个用于微量分析的能量色散X射线光谱(EDS)系统，以及一个电子背散射探测器(EBSD)，以获得样品的衍射图案。这种能力的结合将使材料科学、工程以及地球和行星科学的研究项目成为可能。化学工程系将研究用于能源转换和污染控制的先进催化剂、耐用燃料电池和用于低成本光伏的无缺陷Ge/Si。其他项目包括新型微流控装置、可能用于DNA测序的离子通道、生物膜中的细胞-表面相互作用以及用于药物输送的气雾剂衍生颗粒。电气工程系将使用该仪器来提高激光和红外探测器的效率，并在晶格不匹配材料的外延生长方面取得进展。机械和土木工程系将有助于提高对机械性能的尺度效应的理解，特别是在纳米尺度上，并使研究晶界滑动和光子带隙材料的力学作为传感器来检测关键设施中的损坏。FIB是一种能够研究复杂地质样品薄片的技术。地球和行星科学学院的研究包括大陆碰撞期间形成的高压变质岩的变形和变质作用，以及地球上地幔中流体/岩石相互作用的性质。这项研究对于了解地壳和地幔之间的地球化学相互作用是必不可少的。对岩石中磁性载体的详细研究将提高该大学理解古地磁记录的能力，古地磁记录对于约束世界各地复杂地质地形的构造演化至关重要。最后，FIB将革命性地研究太阳系中最早形成的固体的特定地点区域，这些固体存在于美国宇航局星尘任务返回的碳质球粒陨石和彗星粒子中。这些稀有和有价值的样品必须通过集成的高空间分辨率技术，如FIB-SEM，离子探针和电子显微镜来表征结构，化学和同位素，以阐明它们复杂的形成和热历史。广泛的影响在新墨西哥州大学对这种制造和分析工具的巨大需求，开放访问这样一件高科技设备是必要的，以促进新墨西哥州的科学和技术的发展。来自新墨西哥州州立大学五个系和至少另外两所新墨西哥州院校的教员将参与这一项目。教职员工的参与者从早期的职业助理教授到资深教职员工。由于北卡罗来纳大学是一个西班牙裔服务机构，来自代表人数不足的群体的大量学生将受益于这一设施。研究生、本科生和博士后都将有机会亲身接触到这种仪器。该项目预计，在该仪器完全投入使用后，将有大约50名常规用户。他们将通过新课程开发将研究整合到他们的学术计划中。通过利用这一设施进行推广和演示，他们还将接触到广泛的学生(K-12)。该仪器将放置在地球和行星科学部地下室的电子微束分析设备中。这座建筑是地质博物馆和陨石博物馆的所在地；这两个设施都吸引了来自大阿尔伯克基地区和更远地区的学校的大量游客。他们计划扩大他们的分析仪器套件的使用，用于旨在开放参观和招募活动的演示，帮助他们将纳米制造的兴奋带给普通公众。FIB特别适合展示我们通过实时成像执行纳米级加工的能力。该设施还将通过向新墨西哥州和其他地方的小型初创公司提供机会，帮助将研究想法转化为商业产品。

PROPOSAL NUMBER: CBET-0723224PRINCIPAL INVESTIGATOR: Abhaya DatyeINSTITUTION: University of New MexicoPROPOSAL TITLE: MRI: Focused Ion Beam System for Nano-Fabrication and Nano- Machining of MaterialsIntellectual MeritThe project supports the acquisition a dual beam Focused Ion Beam (FIB) system consisting of an electron optical column for imaging (an environmental scanning electron microscope ESEM) and an ion column that is used for nano-scale machining. The instrument will be equipped with an energy dispersive X-ray spectroscopy (EDS) system for microanalysis, and an electron back-scatter detector (EBSD) to obtain diffraction patterns of the sample. This combination of capabilities will enable research projects inmaterials science, engineering and earth and planetary sciences. Faculty in Chemical Engineering will study advanced catalysts for energy conversion and pollution control, durable fuel cells and defect free Ge/Si for low cost photovoltaics. Other projects include novel microfluidic devices, ion channels with potential use in DNA sequencing, cell-surface interactions in bio-films and aerosol derived particles for drug delivery. Faculty in Electrical Engineering will use the instrument for increasing efficiency of lasers and IR detectors and to make advances in epitaxial growth of lattice-mismatched materials. Faculty in Mechanical and Civil engineering will help improve understanding of scale effects on mechanical properties, particularly at the nanoscale and enable research on mechanics of grain boundary sliding and photonic band gap materials as sensors to detect damage in critical facilities. The FIB is an enabling technology to study thin sections of complex geological samples. Research by Faculty in Earth and Planetary Sciences includes studies of deformation and metamorphism in high pressure metamorphic rocks formed during continental collisions and the nature of fluid/rock interactions in the Earth's upper mantle. This research is essential for understanding the geochemical interactions between crust and mantle. Detailed studies of magnetic carriers in rocks will improve the university's ability to understand the paleomagnetic record that is essential for constraining the tectonic evolution of complex geologic terrains around the world. Finally, the FIB will revolutionize the ability to study sitespecific regions of the earliest solids formed in the solar system found in carbonaceous chondrites and cometary particles returned by the NASA STARDUST mission. Such rare and valuable samples must be characterized structurally, chemically and isotopically by integrated high spatial resolution techniques such as FIB-SEM, ion microprobe and TEM to elucidate their complex formational and thermal histories.Broader ImpactThere is tremendous need for this fabrication and analysis tool at UNM and open access to such a piece of high-tech equipment is necessary to foster the growth of science and technology in the state of New Mexico. Faculty from five departments at UNM and from at least two other New Mexico institutions will participate in this project. The faculty participants range from early career assistant professors to established senior faculty. Since UNM is a Hispanic Serving Institution, significant numbers of studentsfrom underrepresented groups will benefit from this facility. Graduate students, undergraduate students as well as post-docs will get hands-on access to this instrument. The project expects to have approximately 50 regular users for this instrument, after it becomes fully operational. They will integrate the research into their academic programs through new course development. By using this facility for outreach and demonstrations, they will also reach a broad cross section of students (K-12). The instrument will belocated in the Electron Microbeam Analysis Facility in the basement of the Department of Earth and Planetary Sciences. This building houses the Geology and Meteorite Museums; both facilities attract large numbers of tours from schools in the greater Albuquerque area as well as further a field. They plan to expand use of their suite of analytical instruments for demonstrations aimed at open house and recruiting events, helping them take the excitement of nanofabrication to the lay public. The FIB is particularly suited to demonstrate our abilities to perform nanoscale machining, with real time imaging. This facility will also help convert research ideas into commercial products, by providing access to small start-up companies in New Mexico and elsewhere.