Abscheidung keramischer Wärmedämmschichten mittels Gasflusssputtern

“气流溅射沉积陶瓷热障涂层”项目旨在研究气流溅射在燃气轮机中的应用。尽管气流溅射技术具有相对较低的沉积速率，但它比EB-PVD方法更具成本效益。气流溅射制备的涂层具有与EB-PVD涂层相似的微观结构，因此在寿命方面应优于APS涂层。此外，显微组织可以在很大范围内控制。到目前为止，还没有关于显微组织与工艺参数之间关系的系统研究。在第一个项目阶段，利用简化的模型系统确定了参数对过程的影响。在第二个项目阶段，结果将转移到一个完整的热障涂层系统，涂层结构将得到优化。

The project "deposition of ceramic thermal barrier coatings by gas flow sputtering" is intended to study the suitability of gas flow sputtering for applications in gas turbines. Although the gas flow sputtering technique has a comparably low deposition rate, it is considerably more cost-efficient than the EB-PVD method. Coatings produced by gas flow sputtering have a microstructure similar to that of EB-PVD-coatings and should thus be superior to APS coatings with respect to their life time. Furthermore, the microstructure can be controlled within a wide range. So far, no systematic investigations of the dependence of the microstructure on the process parameters have been published. In the first project phase, the parameter influence on the process has been determined using a simplified model system. In the second project phase, the results will be transferred to a full thermal barrier coating systems and the coating structure will be optimised.