Abscheidung keramischer Wärmedämmschichten mittels Gasflusssputtern

“气流溅射沉积陶瓷热障涂层”项目旨在研究气流溅射在燃气轮机中应用的适用性。虽然气流溅射技术具有非常低的沉积速率，但它比EB-PVD方法具有更高的成本效益。通过气流溅射产生的涂层具有与EB-PVD涂层相似的微观结构，因此在寿命方面应优于APS涂层上级。此外，可以在宽范围内控制显微结构。到目前为止，还没有系统的调查的依赖性的微观结构的工艺参数已公布。在第一个项目阶段，参数对过程的影响已被确定使用一个简化的模型系统。 在第二个项目阶段，研究结果将转移到完整的热障涂层系统中，并优化涂层结构。

The project "deposition of ceramic thermal barrier coatings by gas flow sputtering" is intended to study the suitability of gas flow sputtering for applications in gas turbines. Although the gas flow sputtering technique has a comparably low deposition rate, it is considerably more cost-efficient than the EB-PVD method. Coatings produced by gas flow sputtering have a microstructure similar to that of EB-PVD-coatings and should thus be superior to APS coatings with respect to their life time. Furthermore, the microstructure can be controlled within a wide range. So far, no systematic investigations of the dependence of the microstructure on the process parameters have been published. In the first project phase, the parameter influence on the process has been determined using a simplified model system. In the second project phase, the results will be transferred to a full thermal barrier coating systems and the coating structure will be optimised.