Fundamental investigations of the temperature-dependent self-organization of PECVD- and PVD-TiSiBCN thin films

随着对热成型领域中使用的工具的使用寿命的要求不断提高，必须采用适用于高工艺温度的新型创新型耐磨涂层系统。热成形工艺如锻造或压铸的特征在于在具有交变应力的高热工艺温度下的循环的、升高的机械载荷。同时，由于材料转移，在工具的表面处产生高摩擦应力。为了保持零件的经济生产并进一步提高对工具表面的要求，需要新的涂层材料。由过渡金属钛的碳化物、氮化物、硼化物或硅化物生成的纳米结构多相涂层确实提供了这些性能。目前，由二元或三元组合物组成的涂层用于减少摩擦引起的磨损。例如，TiN、TiC、TiB 2或TiCN、TiBN是常用的，但它们在涉及降解和氧化的热性能方面受到限制。这些涂层系统预期将元素硅和/或碳扩展以合成在高热负荷条件（700-1000°C）下使用的四元或五元涂层系统。初步研究表明，这些涂层系统，由PVD或PACVD涂层技术生产的被认为是非常有效的，以减少在给定的负载条件下的磨损。似乎它们能够保持甚至优化其机械性能，同时在纳米尺度上改变其结构组成。该提案旨在通过PVD和PECVD技术在高热负荷下原位分析不同生成的涂层的所述涂层特性。实验室条件下的摩擦学研究将揭示涂层的优点。在项目结束时，将获得解释如何设计多相涂层系统以有效减少热成型应用中使用的工具磨损的发现。

With increasing demands for an enhanced service life time of tools used in the field of hot forming, new and innovative wear protecting coating systems for high process temperatures are mandatory. Hot forming processes like forging or die casting are characterized by cyclic, elevated mechanical loads under high thermal process temperatures with alternating stresses. At the same time, high tribological stresses are generated at the surface of the tools due to the material transfer. In order to maintain an economical production of parts and to further enhance the requirements for the tool surfaces, new coating materials are needed. Nanostructured multiphase coatings, generated from carbides, nitrides, borides or silicides of the transient metal titanium do provide these properties.Currently, coatings consisting of binary or ternary compositions are used to reduce tribologically caused wear. For example, TiN, TiC, TiB2 or TiCN, TiBN are commonly used, yet limited in their thermal properties concerning degradation and oxidation. These coating systems are expected to expand the elements silicon and/or carbon to synthetize quaternary or quinary coating systems, which are utilized under high thermal load conditions (700-1000°C). Preliminary investigations show that these coating systems, produced by PVD or PACVD coating technologies are considered to be very efficient to reduce wear under the given load conditions. It seems as if they are capable to preserve or even optimize their mechanical properties while changing their structural composition in nanoscale dimensions. This proposal aims to investigate the described coating properties with analytical methods in-situ under high thermal loads for differently generated coatings by means of PVD and PECVD techniques. Tribological investigations under laboratory conditions will reveal the benefits of the coatings.At the end of the project, finding will be available that explain how multiple phase coating systems are to be designed to effectively reduce wear for tools used in hot forming applications.