Chipscale Multifinger Coordinated Manipulation Methodology for Nanomanufacturing

本研究的主要目标是：（i）调查的问题，技术和原理的一种新的方法来操纵微/纳米尺度的对象，通过多个微尺度的手指的协调行动，和（ii）实现多指微操作器能够协调的操作任务，如抓住，旋转，移动点对点和位置的微尺度的对象在一个定义的工作空间区域上的基板。该方法涉及合成的芯片级设备包括多个独立驱动的顺应性微机构与优化的拓扑结构和末端执行器，可以被引导到工作空间内的任何感兴趣的点接触和互动的微尺度对象通过适当地控制输入驱动。该方法包括了解协调的微操作和必要的输入驱动方案，通过详细的模型来自刚体和柔性体运动学和动力学的第一原理，以及有限元法的运动学和力学。该研究利用了宏观尺度机器人、微/纳米尺度物理学、顺应机制、微系统和微制造的跨学科知识。这项研究如果成功，可能会导致一种新的芯片级微操作器，具有灵巧操作微/纳米尺度物体的先进能力，从而提供几个潜在的好处和更广泛的影响，包括：（i）用于构建复杂微/纳机电系统的纳米制造技术的进步，（ii）通过微操纵器阵列促进大规模纳米制造，以及（iii）通过用更灵巧的显微操纵器取代简单的悬臂末端执行器，来改进扫描电子显微镜和原子力显微镜中的仪器。这项研究在教育方面的更广泛的影响包括为高中生提供几个基于探究的学习机会，为本科生和研究生提供研究机会，包括代表性不足和少数群体，在线传播教育材料，整合研究中的新兴主题，如纳米制造和微/纳米机器人在本科和研究生课程中。

The main objectives of this research are: (i) to investigate the issues, techniques and principles of a novel methodology to manipulate micro/nano-scale objects by means of coordinated action of multiple micro-scale fingers, and (ii) to realize a multifingered micromanipulator capable of coordinated manipulation tasks such as grasp, rotate, move point-to-point and position micro-scale objects in a defined workspace area on a substrate. The approach involves synthesizing a chip-scale device comprised of multiple independently actuated compliant micromechanisms with optimized topology and end effectors that can be guided to any point of interest within the workspace to contact and interact with a micro-scale object by suitably controlling the input actuations. The approach includes understanding the kinematics and mechanics of coordinated micromanipulation and necessary input actuation schemes through detailed models derived from the first principles of rigid-body and flexible-body kinematics and dynamics as well as the finite element method. The research exploits the interdisciplinary knowledge of macro-scale robotics, micro/nano-scale physics, compliant mechanisms, microsystems and microfabrication.This research, if successful, could lead to a new chip-scale micromanipulator with advanced capabilities for dexterous manipulation of micro/nano-scale objects and thus offer several potential benefits and broader impacts including: (i) advancement of the nanomanufacturing technology for building complex micro/nano electromechanical systems, (ii) facilitation of large-scale nanomanufacturing via an array of micromanipulators, and (iii) advancement of the instrumentation in the scanning electron microscopy and the atomic force microscopy by replacing simple cantilever end effectors with more dexterous micromanipulators. The broader impacts in terms of educational aspects of this research include providing several inquiry-based learning opportunities to high school students and research opportunities to undergraduate and graduate students including underrepresented and minority groups, online dissemination of education materials, integration of emerging topics from the research such as nanomanufacturing and micro/nano robotics in undergraduate and graduate level courses.