Dynamics of Capillary Force Actuators

摘要本研究的目的是探索一种在微电子机械系统中产生驱动力的全新的创新技术。这种方法是利用电润湿发生时液桥毛细压力的变化。毛细作用力执行器能够提供比目前流行的技术大十到一百倍的力，并有可能彻底改变微系统的发展。在这项研究中，将对仪表式毛细管力致动器进行微细加工、实验表征，并与电流体模型进行比较。智力优势：这项研究将推动毛细管力驱动技术在几个方面的发展，这对其在微电子机械应用中的采用至关重要。所获得的理解将导致毛细作用力执行器的准确模型，该模型将动态行为与设计选择相关联。所获得的实验结果将验证动力学模型，并为该技术在微电子机械系统中的应用潜力提供论证。最后，几个原型器件的制造和测试将为开发实用的、可制造的执行器提供关键知识。更广泛的影响：这一努力将为本科生和研究生提供一个高度跨学科的研究机会，对于发展广泛的基础知识和实用技术来说是理想的。本科生将制作播客，面向未被充分代表的高中生，将研究体验带入生活。通过来自代表性不足群体的本科生的参与，这一努力将直接影响对多样化工程劳动力的培训。这一努力将使以前无法实现的新微型设备的开发成为可能，并产生造福社会的产品。

Dynamics of Capillary Force ActuatorsAbstractThe objective of this research is to investigate a fundamentally new and innovative technology for generating actuation forces in microelectromechanical systems. The approach is to exploit the change in capillary pressure of a liquid bridge when electrowetting occurs. Capillary force actuators are capable of delivering ten to one hundred times greater force than currently-favored technologies and have the potential to revolutionize the development of microsystems. In this research, instrumented capillary force actuators will be microfabricated, experimentally characterized, and compared to electrohydrodynamic models. Intellectual merit: This research will advance capillary force actuation technology along several fronts essential to its adoption in microelectromechanical applications. The understanding gained will result in accurate models of capillary force actuators that relate dynamic behavior to design choices. The experimental results obtained will confirm the dynamic models and provide demonstration of the potential of this technology for microelectromechanical systems. Finally, the fabrication and testing of several prototype devices will provide knowledge critical to the development of practical, manufacturable actuators. Broader impacts: The effort will provide both undergraduate and graduate students a highly interdisciplinary research opportunity, ideal for the development of broad fundamental knowledge and practical know-how. The undergraduate students will produce podcasts for outreach to underrepresented high school students that bring the research experience to life. Through the involvement of undergraduates from underrepresented groups, this effort will directly impact the training of a diverse engineering workforce. The effort will enable the development of new microdevices that were previously unachievable and result in products that benefit society.