Dynamics of Capillary Force Actuators

毛细力致动器的动力学摘要本研究的目的是调查一个根本性的新的和创新的技术，用于产生微机电系统的驱动力。该方法是利用电润湿发生时液体桥的毛细管压力的变化。毛细管力致动器能够提供比目前受欢迎的技术大十到一百倍的力，并有可能彻底改变微系统的发展。在这项研究中，仪器毛细管力致动器将微加工，实验表征，并比较电流体动力学模型。 智力优点：这项研究将推动毛细力驱动技术沿着几个方面必不可少的微机电应用。所获得的理解将导致毛细管力致动器的动态行为的设计选择相关的准确模型。所获得的实验结果将确认的动态模型，并提供示范的潜力，这种技术的微机电系统。最后，几个原型设备的制造和测试将提供知识的发展，实际的，可制造的执行器的关键。 更广泛的影响：这一努力将为本科生和研究生提供一个高度跨学科的研究机会，非常适合广泛的基础知识和实用知识的发展。本科生将制作播客，以推广到代表性不足的高中生，使研究经验的生活。通过来自代表性不足群体的本科生的参与，这一努力将直接影响多元化工程人才的培训。这一努力将使以前无法实现的新微器件的开发成为可能，并产生有益于社会的产品。

Dynamics of Capillary Force ActuatorsAbstractThe objective of this research is to investigate a fundamentally new and innovative technology for generating actuation forces in microelectromechanical systems. The approach is to exploit the change in capillary pressure of a liquid bridge when electrowetting occurs. Capillary force actuators are capable of delivering ten to one hundred times greater force than currently-favored technologies and have the potential to revolutionize the development of microsystems. In this research, instrumented capillary force actuators will be microfabricated, experimentally characterized, and compared to electrohydrodynamic models. Intellectual merit: This research will advance capillary force actuation technology along several fronts essential to its adoption in microelectromechanical applications. The understanding gained will result in accurate models of capillary force actuators that relate dynamic behavior to design choices. The experimental results obtained will confirm the dynamic models and provide demonstration of the potential of this technology for microelectromechanical systems. Finally, the fabrication and testing of several prototype devices will provide knowledge critical to the development of practical, manufacturable actuators. Broader impacts: The effort will provide both undergraduate and graduate students a highly interdisciplinary research opportunity, ideal for the development of broad fundamental knowledge and practical know-how. The undergraduate students will produce podcasts for outreach to underrepresented high school students that bring the research experience to life. Through the involvement of undergraduates from underrepresented groups, this effort will directly impact the training of a diverse engineering workforce. The effort will enable the development of new microdevices that were previously unachievable and result in products that benefit society.