MRI: Acquisition of an Inductively Coupled Plasma (ICP) Etcher for Nano/Micro Device Fabrication

该项目的目标是实现均匀和高度选择性的各向异性蚀刻能力，用于研究和培训史蒂文斯的微/纳米级传感器，致动器和设备的制造。为了实现这一目标，我们要求获得最先进的电感耦合等离子体（ICP）蚀刻系统的资金。知识价值。所要求的ICP蚀刻系统将极大地增强史蒂文斯微设备实验室现有的微/纳米制造能力。目前直接受益于该系统的研究项目包括：1)。传感、通信和医疗用纳米和微型器件；2)单电子碳纳米管存储器件；3)用于微流体和纳米生物科学应用的纳米工程表面；4)自下而上的微化学系统原型设计。此外，这个ICP蚀刻机将促进和培养一个多学科的研究密集型的学习环境在微系统和纳米技术在史蒂文斯。更广泛的影响。这ICP蚀刻机是必不可少的，以完成在史蒂文斯的微/纳米制造能力的制造工艺链。它的能力将极大地影响许多多学科领域的研究项目，其中许多具有重要的广泛影响，包括：中风患者血栓回收的新方法，新型记忆和波导器件，生物分子传感，神经再生和伤口愈合。该仪器申请还将支持史蒂文斯正在进行的两项教育计划：一个新的纳米技术跨学科博士项目和NSF纳米技术本科教育资助，通过增加学生接触拟议的ICP蚀刻机和利用其能力的研究项目的数量。研究结果也将通过外展项目提供给K-12学生。

The objective of this project is to achieve uniform and highly selective anisotropic etching capabilities for research and training in fabrication of micro/nanoscale sensors, actuators and devices at Stevens. To achieve this objective we request funding for the acquisition of a state-of-the-art Inductively Coupled Plasma (ICP) etching system. Intellectual Merit. The requested ICP etching system will greatly augment existing micro/nano fabrication capabilities within the MicroDevices Laboratory at Stevens. Current research projects directly benefiting from the requested system include: 1). Nano and micro devices for sensing, communications and medicine; 2) Single-electron carbon nanotube memory devics; 3) Nanoengineered surfaces for microfluidic and nanobioscience applications; and 4) Bottom-up prototyping of microchemical systems. Further, this ICP Etcher will promote and foster a multidisciplinary research-intense learning environment in microsystems and nanotechnology at Stevens.Broader Impact. This ICP etcher is essential to complete the fabrication process chain for micro/nano fabrication capabilities at Stevens. Its capability will greatly impact research projects in a number of multidisciplinary areas, many of which have significant broader impact, including: new methods for thrombus retrieval from stroke patients, novel memory and waveguide devices, biomolecular sensing, and nerve regeneration and wound healing. This instrumentation request will also support two educational initiatives underway at Stevens: a new cross-disciplinary PhD program in Nanotechnology and an NSF Nanotechnology Undergraduate Education grant, by increasing the number of students exposed to the proposed ICP Etcher and the research projects leveraging its capabilities. Research results will also be made available to K-12 students through the outreach program.