STTR Phase II: Diamond Nanoprobes for Atomic Force Microscopy - Imaging, Metrology, Material Property Measurement, Process Control, and Manipulation with Ultrahigh Performanc

STTR 第二阶段：用于原子力显微镜的金刚石纳米探针 - 成像、计量、材料特性测量、过程控制和超高性能操作

• 批准号: 0823002
• 负责人: John Carlisle
• 金额: $ 49.97万
• 依托单位: ADVANCED DIAMOND TECHNOLOGIES
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-08-01 至 2012-07-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0823002&HistoricalAwards=false
• 关键词: STTR; Phase; II; Diamond; Nanoprobes

This STTR Phase II project will develop commercially viable atomic force microscope (AFM) probes fabricated from ultrananocrystalline diamond. The project will refine the processes developed in Phase I and bring contact and non-contact all-diamond probes to market. Probes using conducting diamond that are chemically and electronically tunable and have superb tribological properties will also be developed. This work will facilitate new industrial applications for AFM, including high-throughput imaging, metrology, and characterization of large quantities of materials, local electrical characterization for process control in micro/nanoelectronics, nanomechanical characterization of MEMS/NEMS devices, and ultraprecise hard mask correction for the micro/nanolithography industry.

这个STTR第二阶段项目将开发商业上可行的原子力显微镜（AFM）探针制造的超纳米金刚石。 该项目将完善第一阶段开发的工艺，并将接触式和非接触式全金刚石探头推向市场。还将开发使用导电金刚石的探针，这些探针具有化学和电子可调性，并具有极好的摩擦学特性。这项工作将促进AFM的新工业应用，包括高通量成像，计量和大量材料的表征，微/纳电子学过程控制的局部电气表征，MEMS/NEMS设备的纳米机械表征，以及微/纳米光刻行业的超精密硬掩模校正。