STTR Phase I: Piezoelectric/diamond RF MEMS Filters for Mobile Wireless Applications

该奖项是根据2009年美国复苏和再投资法案（公法111-5）资助的。这个小型企业技术转让第一阶段项目将开发超晶金刚石（UNCD®）作为高频结构层，用于无线通信系统中用于MHz-GHz应用的压电换能型微机械RF谐振器。从理论上讲，金刚石是理想的RF MEMS谐振器材料，具有高声速、硬度、热稳定性和线性度的极端体特性，加上低粘性和理想的表面化学性质。金刚石MEMS谐振器可以使MEMS射频器件用于民用和军事应用，并允许MEMS与微电子的直接集成。与现有技术相比，射频MEMS的尺寸和功耗有可能减少100倍，同时将“片上无线电”系统的性能扩展到GHz，到2010年，射频MEMS市场预计将达到11亿美元。

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).This Small Business Technology Transfer Phase I project will develop ultrananocrystalline diamond (UNCD®) as a high frequency structural layer for piezoelectrically-transduced micromachined RF resonators for MHz-GHz applications in wireless telecommunication systems. Diamond, in theory, is the ideal RF MEMS resonator material, having the extreme bulk properties of high acoustic velocity, hardness, thermal stability, and linearity, combined with the surface properties of low stiction and desirable surface chemistry.Diamond MEMS resonators can enable MEMS RF devices for civilian and military applications and allow for the direct integration of MEMS with microelectronics. With the potential for 100× reduction in size and power consumption relative to existing technologies while extending the performance of "radio on a chip" systems into the GHz, the RF MEMS market is forecasted at $1.1 billion by 2010.