STTR Phase I: Piezoelectric/diamond RF MEMS Filters for Mobile Wireless Applications

STTR 第一阶段：用于移动无线应用的压电/金刚石 RF MEMS 滤波器

• 批准号: 0930676
• 负责人: John Carlisle
• 金额: $ 15万
• 依托单位: ADVANCED DIAMOND TECHNOLOGIES
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2009
• 资助国家: 美国
• 起止时间: 2009-07-01 至 2010-10-31
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0930676&HistoricalAwards=false
• 关键词: STTR; Phase; Piezoelectric; diamond; RF

This award is funded under the American Recovery and Reinvestment Act of 2009 (Public Law 111-5).This Small Business Technology Transfer Phase I project will develop ultrananocrystalline diamond (UNCD®) as a high frequency structural layer for piezoelectrically-transduced micromachined RF resonators for MHz-GHz applications in wireless telecommunication systems. Diamond, in theory, is the ideal RF MEMS resonator material, having the extreme bulk properties of high acoustic velocity, hardness, thermal stability, and linearity, combined with the surface properties of low stiction and desirable surface chemistry.Diamond MEMS resonators can enable MEMS RF devices for civilian and military applications and allow for the direct integration of MEMS with microelectronics. With the potential for 100× reduction in size and power consumption relative to existing technologies while extending the performance of "radio on a chip" systems into the GHz, the RF MEMS market is forecasted at $1.1 billion by 2010.

该奖项由2009年美国复苏和再投资法案(公法111-5)资助。这个小型企业技术转让第一阶段项目将开发超非晶金刚石(UNCD®)作为用于无线电信系统中MHz-GHz应用的压电式微机械射频谐振器的高频结构层。从理论上讲，金刚石是一种理想的射频MEMS谐振器材料，它具有极高的声速、硬度、热稳定性和线性度，并结合了低粘滞和理想的表面化学特性。金刚石MEMS谐振器可以使MEMS射频器件用于民用和军用，并使MEMS与微电子直接集成。与现有技术相比，射频MEMS的体积和功耗有可能减少100倍，同时将“单芯片无线电”系统的性能扩展到GHz，预计到2010年，RFMEMS市场将达到11亿美元。