Femtosecond-Laser Processing of Hybrid Micro- and Nano-Structures in Glass

该奖项的研究目标是使用飞秒（fs）激光加工来定制玻璃中的纳米和微观结构，其精度和分辨率是传统图案化和光刻技术无法达到的。该方法是基于控制激光加工和随后的热处理条件，以独立地控制在一定范围的长度尺度上的结构的创建。过程-结构关系将构成本研究项目的中心主题。飞秒激光加工变量的光束曝光区的体积和界面结构的影响将进行研究。实验将涉及使用SEM和TEM以及共焦拉曼和荧光显微镜表征结构修饰。我们将确定一组最佳的制程参数，并利用这些参数来制造具有微米和纳米尺度特征的融合三维结构，发展对这种混合制造工艺的基本理解将导致在光学器件工程中的应用（例如波导，耦合器），同时也对更广泛的纳米制造领域产生积极影响（例如烧蚀加工、精密钻孔）和微电子（例如离子注入半导体、光掩模修复）。该项目将在研究和教育两个组成部分高度协同。一方面，研究生将专注于实验，这将建立飞秒激光加工的基础，作为一种多功能工具，在玻璃中设计微米和纳米级架构。另一方面，该项目将培养训练有素的研究生，为在跨学科环境中工作做好充分准备，他们将接受光学材料加工和工程以及精密仪器的培训，包括超快激光和最先进的电子显微镜。该项目由土木，机械和制造创新（CMMI）部门的材料加工制造（MPM）计划，化学，生物工程，环境和运输系统（CBET）部门的热运输过程（TTP）计划以及工程局（ENG）提供的资金共同资助，以支持跨部门研究。

The research objective of this award is to use femtosecond (fs)-laser processing to tailor-make nano-and microstructures in glass with a degree of precision and resolution unattainable by, for example, conventional patterning and lithography techniques. The approach is based on controlling the laser processing and subsequent heat treatment conditions to independently control the creation of structures on a range of length scales. Processing-structure relationships will form the central theme of this research project. The effect of fs laser processing variables on the bulk and interfacial structure of the beam-exposed zones will be investigated. Experiments will involve characterization of the structural modification using SEM and TEM as well as confocal Raman and fluorescence microscopy. An optimized set of processing parameters will be determined and used to fabricate merged three-dimensional architectures with features on micrometer and nanometer scales.Developing the fundamental understanding of this hybrid fabrication process will lead to applications in optical device engineering (e.g. waveguides, couplers), while also making a positive impact on the broader field of nanomanufacturing (e.g. ablation machining, precision drilling) and microelectronics (e.g. ion-implanted semiconductors, photomask repair). This project will be highly synergistic in both the research and education components. On the one hand research students will focus on experiments that will build the foundations of fs-laser processing as a versatile tool to engineer micro and nano-scale architectures in glasses. On the other, the project will produce highly trained graduate students well prepared to work in a cross- disciplinary setting who will have received training in optical materials processing and engineering as well as sophisticated instrumentation, including ultrafast lasers and state-of-the-art electron microscopy. This project is jointly funded by the Materials Processing & Manufacturing (MPM) Program, of the Civil, Mechanical, and Manufacturing Innovation (CMMI) Division, by the Thermal Transport Processes (TTP) Program, of the Chemical, Bioengineering, Environmental, and Transport Systems (CBET) Division, and by funding provided from the Directorate for Engineering (ENG) to support Inter Divisional Research.