Nanoporous Metals Incorporated into MEMS and NEMS Devices for Enhanced Functionality

将纳米多孔金属纳入 MEMS 和 NEMS 器件以增强功能

• 批准号: 0826093
• 负责人: Jeffrey Kysar
• 金额: $ 28万
• 依托单位: Columbia University
• 依托单位国家: 美国
• 项目类别: Standard Grant
• 财政年份: 2008
• 资助国家: 美国
• 起止时间: 2008-07-15 至 2011-06-30
• 项目状态: 已结题
• 来源: https://www.nsf.gov/awardsearch/showAward?AWD_ID=0826093&HistoricalAwards=false
• 关键词: Nanoporous; Metals; Incorporated; into; MEMS

The research objective of this award is the incorporation of nanoporous gold into micro-electro-mechanical systems (MEMS) and nano-electro-mechanical systems (NEMS). Nanoporous gold is fabricated by selectively dissolving silver from a gold-silver metal alloy using various chemical etchants. The resulting nanoporous gold films will be several hundred nanometers in thickness and will have pores and interconnecting ligaments that are between 5 and 50 nanometers. Nanoporous gold is a particularly desirable system because of its resistance to corrosion and oxidation and also because the gold surface can be tailored or functionalized to be sensitive to adsorption by various biological and chemical agents. The nanoscale and microscale devices to be fabricated in this project will consist of layered cantilever beams, with one of the layers consisting of nanoporous gold and the other layer consisting of various different materials depending upon the application. When chemicals or biological species come into contact with the nanoporous gold, the cantilever beam will develop a curvature which can be detected using various optical methods. If successful, the results of this research will lead a set of scalable methods and techniques that are amenable to the large-scale fabrication of submicron sensors and actuators using nanoporous metal films. This will enable the fabrication of various sensors and actuators which could have direct application in many different areas such as chemical and biological sensing and actuation and control of MEMS and NEMS devices.

该奖项的研究目标是将纳米多孔金纳入微机电系统（MEMS）和纳米机电系统（NEMS）。通过使用各种化学蚀刻剂从金-银金属合金中选择性溶解银来制造纳米多孔金。所得纳米多孔金膜的厚度将为几百纳米，并且将具有介于5纳米和50纳米之间的孔和互连韧带。纳米多孔金是一种特别理想的系统，因为它耐腐蚀和氧化，也因为金表面可以定制或功能化，对各种生物和化学试剂的吸附敏感。该项目中制造的纳米级和微米级器件将由分层悬臂梁组成，其中一层由纳米多孔金组成，另一层由各种不同的材料组成，具体取决于应用。当化学物质或生物物种与纳米多孔金接触时，悬臂梁将产生曲率，可以使用各种光学方法检测到。如果成功，这项研究的结果将导致一套可扩展的方法和技术，适用于使用纳米多孔金属薄膜大规模制造亚微米传感器和致动器。这将使得能够制造各种传感器和致动器，这些传感器和致动器可以直接应用于许多不同的领域，例如MEMS和NEMS设备的化学和生物感测以及致动和控制。