Collaborative Research: Improvement of MEMS Performance by Structural Vibrations - Theory and Practical Implementations

微机电系统（MEMS）中运动部件之间的粘附接触（粘附）是限制可靠性的主要问题。粘滞接触，简称为？静摩擦故障，？对部件是致命的;静摩擦阻碍了各个部件的正常工作，并因此危害了整个装置的可靠性。研究人员进行的初步实验表明，电致结构振动可导致杆释放的开始。本研究奋进的目的是建立一个理论基础，通过对真实的MEMS器件的实验验证，使用电激励来驱动MEMS组件，以便（i）防止粘附（通过机械抖动）和（ii）修复静摩擦故障。这种非接触（非侵入性）方法将使得能够在不对组件或其相邻组件造成损坏的情况下防止粘附和释放粘附。此外，电致动可以内置到MEMS芯片中，使用芯片的现有功能来克服粘附。这是一种成本效益高、易于实施的方法，可在现场使用。还要注意的是，这里开发的框架也将适用于纳米级设备（NEMS）。 这项工作分为实验和理论部分。该项目的实验部分涉及使用简化的几何形状（微杠杆）和真实的MEMS组件（齿轮系统，镜子等）。以验证模型结果并证明电致振动在静摩擦预防和静摩擦修复中的实用性。理论模型将被创建，以发展一个更完整的理解的基本力学在抖动和坚持释放processes.Currently有没有商业上可用的MEMS或纳米机电系统（NEMS）与接触/滑动部分由于可靠性问题引起的粘附故障。为了使它们能够商业化，需要在正常使用条件下防止静摩擦和维修故障设备的实用技术。所提出的方法是一种可行的办法，能够实现商业化。这里开发的一般框架可以扩展到纳米器件。 该项目的教育部分将MEMS振动测试集成到所需的本科实验室课程中。这将使学生获得MEMS的实践经验，并将证明近场力（在宏观尺度测试中可以忽略不计）在所有微观尺度测试中可能不会被忽略。优秀的本科生，特别是那些来自代表性不足的群体（请注意，UNM是一个西班牙裔服务机构（HSI）），将参与研究。

Sticking contact (adhesion) between moving components in Micro-ElectroMechanical Systems (MEMS) is a major problem limiting reliability. Sticking contact, referred to as ?stiction failure,? is fatal to the component; stiction prevents the individual component from operating properly and, hence, jeopardizes the reliability of the overall device. Preliminary experiments, performed by the investigators, indicate that electrically induced structural vibrations can lead to the initiation of stick-release. The purpose of this research endeavor is to create a theoretical foundation, validated by experiments on real MEMS devices, for using electrical excitation to drive MEMS components in order (i) to prevent adhesion (through mechanical dithering) and (ii) to repair stiction failures. This non-contacting (noninvasive) approach will enable stick-prevention and stick-release of a component without causing damage to the component or its neighbors. Moreover, the electrical actuation may be built into the MEMS chip, using the existing functionality of the chip to overcome adhesion. This is a cost effective, easy-to-implement approach that may be used in-situ. Also note that the framework developed here will also be applicable on nano-scale devices (NEMS). This work is broken into an experimental and theoretical component. The experimental portion of this project involves using simplified geometries (micro-cantilevers) and real MEMS components (gear systems, mirrors, etc.) to validate the model results and to demonstrate the utility of electrically induced vibrations in both stiction prevention and stiction repair. Theoretical models will be created to develop a more complete understanding of the fundamental mechanics involved in the dithering and stick-release processes.Currently there are no commercially available MEMS or Nano-Electro MechanicalSystems (NEMS) with contacting/sliding parts due to the reliability issue caused by adhesion failures. To enable their commercial introduction, practical techniques for the prevention of stiction and repair of failed devices under normal service conditions are required. The proposed methodology is a viable approach, enabling commercialization. The general framework developed here may be extended to nano-devices. The educational portion of this project integrates MEMS vibrations testing into a required undergraduate lab course. This will give students hands-on experience with MEMS and will demonstrate that near field forces (negligible in macro-scale tests) may not be ignored in all micro-scale tests. Outstanding undergraduates and particularly those from under-represented groups (note that the UNM is a Hispanic Serving Institution (HSI)), will be involved in the research.