CAREER: Nonlinear Mechanically Amplified MEMS for Sensing and Communication

该职业计划将使用2009年美国复苏和再投资法案（公法111-5）提供的资金进行奖励。这个职业生涯的建议描述了一个研究计划，重点是参数放大微机电系统（MEMS）的闭环稳定，并侧重于在高中，本科和研究生水平的动手实验学习的教学计划。MEMS谐振器具有作为传感器和作为通信设备的重要应用。参量放大是发生在微机械元件内部的一种非线性现象，具有提高灵敏度和降低功耗的潜力。虽然参量放大是一个众所周知的现象，但由于不稳定和增益变化问题，它在MEMS中几乎没有实际用途，这些问题是因为以前的研究人员只研究开环谐振器而产生的。智力价值：该提案解决了当前关于参数放大MEMS谐振器的知识空白。在研究参数谐振器开环动力学的早期工作的基础上，将开发控制策略来稳定非线性振荡器并产生具有稳定换能增益的谐振传感器。更广泛的影响：为实现稳定的高增益非线性谐振器而开发的方法将在微机械力传感器（如原子力显微镜、陀螺仪和磁力计）以及通信设备（如振荡器和滤波器）中具有广泛的应用。拟议教学计划的核心是为高中学生开发和教授MEMS和微制造的实践暑期课程。来自代表性不足的少数民族和经济弱势群体的本科生的研究机会将与加州大学戴维斯分校校园的现有项目合作提供。

This CAREER proposal will be awarded using funds made available by the American Recovery and Reinvestment Act of 2009 (Public Law 111-5). This CAREER proposal describes a research plan focused on closed-loop stabilization of parametrically-amplified micro-electromechanical systems (MEMS), and a teaching plan focused on hands-on experimental learning at the high-school, undergraduate, and graduate levels. MEMS resonators have important applications as sensors and as communication devices. Parametric amplification, a nonlinear phenomenon occurring within the micromechanical element, has the potential to enhance the sensitivity and reduce the power consumption of these devices. Although parametric amplification is a well-known phenomenon, it has seen little practical use in MEMS due to instability and gain-variation issues, problems which arose because previous researchers studied only open-loop resonators. Intellectual merit: This proposal addresses gaps in the current knowledge about parametrically-amplified MEMS resonators. Building on earlier work studying the open-loop dynamics of parametric resonators, control strategies will be developed to stabilize nonlinear oscillators and to produce resonant sensors with stable transduction gain. Broader impact: The methods developed to achieve stable, high-gain nonlinear resonators will have broad applications in micromechanical force sensors, such as atomic force microscopes, gyroscopes, and magnetometers, as well as in communication devices such as oscillators and filters. The centerpiece of the proposed teaching plan is to develop and teach a hands-on summer course on MEMS and microfabrication for high-school students. Research opportunities for undergraduates from under-represented minority and economically disadvantaged groups will be provided in cooperation with existing programs on the UC Davis campus.